公开(公告)号：US20190123068A1

公开(公告)日：2019-04-25

申请号：US16031543

申请日：2018-07-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： MINWOO Lee ,  Byunghoon Kang ,  Heekyun Shin ,  Seungjun Moon ,  Woojin Cho

IPC: H01L27/12 ,  H01L27/32 ,  H01L51/52 ,  H01L51/00

Abstract: A system of forming a debonding layer includes a &bonding layer forming device configured to form a coating layer by coating a graphene oxide layer on a support substrate. The debonding layer forming device is configured to form a debonding layer by heat-treating the coating layer. An optical measuring device is configured to classify the support substrate into a plurality of cell areas. The optical measuring device is configured to measure a thickness of at least one of the coating layer in at least one cell area of the plurality of cell areas.