公开(公告)号：US20200230738A1

公开(公告)日：2020-07-23

申请号：US16746563

申请日：2020-01-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： SEUNGHWAN JUNG ,  SEOKHWAN KIM ,  SANGHYUN JUNG ,  WOODONG KIM ,  JAEIL KIM ,  IIYOUNG JEONG ,  JONGKIL HAN

IPC: B23K26/03 ,  B23K26/08 ,  B23K37/04 ,  B23K26/04 ,  G05B19/402

Abstract: An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error compensation unit for generating a table to compensate for an error. The error compensation unit includes a grid plate disposed on the stage and an imaging unit for imaging the grid plate. The motor driver outputs a position synchronization signal to the imaging unit according to a position of the stage. The imaging unit receives the position synchronization signal from the motor driver and images the grid plate while moving the stage.