公开(公告)号：US20150198872A1

公开(公告)日：2015-07-16

申请号：US14307797

申请日：2014-06-18

Applicant: Samsung Display Co., LTD.

Inventor： Yong SON ,  Min KANG ,  Bong-Yeon KIM ,  Dong-Eon LEE ,  Jun-Hyuk WOO ,  Hyun-Joo LEE ,  Sang-Uk LIM ,  Jin-Ho JU

IPC: G03F1/26 ,  G03F7/40

CPC classification number: G03F1/26 ,  G02F2001/136231 ,  G03F7/20 ,  G03F7/40 ,  H01L27/1288

Abstract: A phase shift device includes a phase shift mask which includes a transparent substrate, and a phase shift pattern which is provided on the transparent substrate, and includes a first area having a first thickness, a second area having a second thickness which is less than the first thickness, a first opening having a first opening width and defined at the first area, and a second opening having a second opening width and defined at the second area.

Abstract translation: 相移装置包括：包括透明基板的相移掩模和设置在透明基板上的相移图案，并且包括具有第一厚度的第一区域，第二区域的第二厚度小于 第一厚度，具有第一开口宽度并限定在第一区域的第一开口，以及具有第二开口宽度并限定在第二区域的第二开口。

公开(公告)号：US20130316270A1

公开(公告)日：2013-11-28

申请号：US13835567

申请日：2013-03-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Bong-Yeon KIM ,  Min KANG ,  Seung-Bo SHIM ,  Jong-kwang LEE ,  Jin-Ho JU ,  Jeong-Won KIM ,  Tae-Gyun KIM ,  Chul-Won PARK ,  Jun-Hyuk WOO ,  Hyun-Joo LEE

IPC: G03F1/42

CPC classification number: G03F1/42

Abstract: A mask may include a circuit area and a pixel area. The circuit area includes a circuit pattern. The pixel area includes a pixel pattern which is extended in a length direction and an assist pattern which is at an end portion of the pixel pattern and adjacent to the circuit area.

Abstract translation: 掩模可以包括电路区域和像素区域。 电路区域包括电路图案。 像素区域包括在长度方向上延伸的像素图案和处于像素图案的端部并且与电路区域相邻的辅助图案。