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公开(公告)号：US11788974B2
公开(公告)日：2023-10-17
申请号：US17119166
申请日：2020-12-11
申请人： Rigaku Corporation
IPC分类号： G01N23/20016 , G01N23/207
CPC分类号： G01N23/20016 , G01N23/207 , G01N2223/056 , G01N2223/303 , G01N2223/61
摘要： There is provided a control apparatus 40 that controls a tilt of a sample, the control apparatus comprising an input section 41 that receives an input of inclination information representing inclination of the sample with respect to a ϕ axis; an adjustment amount determination section 43 that determines adjustment amounts of a ω value and a χ value for correcting a deviation amount between a scattering vector and a normal line to a sample surface or a lattice plane with respect to a ϕ value that varies, using the inclination information; and a drive instruction section 47 that drives a goniometer according to ϕ axis rotation of the sample, based on the determined adjustment amounts of the ω value and the χ value, during an X-ray diffraction measurement.
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公开(公告)号：US11221423B2
公开(公告)日：2022-01-11
申请号：US17078626
申请日：2020-10-23
申请人： Rigaku Corporation
摘要： There are provided a storage section 220 that stores an output value read out by counting a pulse signal of incident X-rays, by a photon-counting type semiconductor detector; and a calculation section 230 that calculates a count value based on the output value that has been read out, wherein the calculation section 230 uses a model in which an apparent time constant of the pulse signal monotonously decreases against increase in pulse detection ratio with respect to exposure. According to such a model, the corresponding apparent time constant is able to be obtained even in any higher count rate. As a result of this, reduced can be the influence of count loss even on the count rate that has not been able to be covered by the conventional method.
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公开(公告)号：US10964439B2
公开(公告)日：2021-03-30
申请号：US16169251
申请日：2018-10-24
申请人： RIGAKU CORPORATION
IPC分类号： G21K1/06 , G01N23/20016 , G01N23/207 , G21K1/02
摘要： An X-ray diffraction apparatus having a solar slit, and a method for preventing the diffraction image on a detector from spreading in the in-plane direction even when an X-ray irradiation region spreads over the sample surface due to measurement by GIXD, thereby allowing for measurement with a short measurement time and a high resolution. The soller slit 100 includes a plurality of metallic thin plates 110, each being perpendicular to the bottom surface, which are arcuately arranged with a predetermined angular interval between each other so as to pass X-rays in a radiating direction from a particular focus, the soller slit being provided to be used at a position through which X-rays diffracted on a sample surface pass, the particular focus being the center of a goniometer circle, the X-rays being irradiated on a sample at an angle for GIXD.
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公开(公告)号：US10585053B2
公开(公告)日：2020-03-10
申请号：US15622900
申请日：2017-06-14
申请人： Rigaku Corporation
IPC分类号： G01N23/207 , G01N23/20008 , G01N23/201 , G01C9/00 , G21K1/02
摘要： An X-ray diffractometer for obtaining X-ray diffraction angles of diffracted X-rays by detecting with an X-ray detector diffracted X-rays diffracted at a sample when X-rays are emitted at the sample at each angle of the angles about a center point of goniometer circles, the X-ray diffractometer having a pinhole member provided with a pinhole, the pinhole allowing X-rays diffracted from the sample to pass so that the diffracted X-rays pass through the center point of the goniometer circle, and other diffracted X-rays are shielded by the pinhole member.
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公开(公告)号：US10444168B2
公开(公告)日：2019-10-15
申请号：US14251829
申请日：2014-04-14
申请人： Rigaku Corporation
IPC分类号： G01N23/20
摘要： At least two values of an X-ray irradiation width are set for a single specimen. A rocking curve is measured for each of the X-ray irradiation widths. A rocking curve width value is determined for each of the rocking curves. The values of the X-ray irradiation width and the values of the rocking curve width are plotted on a planar coordinate system having a vertical axis representing the rocking curve width value and a horizontal axis representing the X-ray irradiation width value, and a rocking curve width shift line is determined based on the plotted points. A gradient of the rocking curve width shift line is determined. A curvature radius of the specimen is determined based on the gradient. The amount of bowing of a single-crystal substrate under measurement can be measured without a need to move the single-crystal substrate for reliable measurement with a small amount of error.
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公开(公告)号：US09322792B2
公开(公告)日：2016-04-26
申请号：US14164618
申请日：2014-01-27
申请人： RIGAKU CORPORATION
IPC分类号： H05G1/00 , G01N23/207
CPC分类号： G01N23/207 , G01N2223/3301
摘要： There is provided an X-ray diffraction apparatus configured to irradiate a sample S on a sample stage with X-rays generated from an X-ray source and detect the X-rays diffracted by a sample using a detector, including a virtual mask setting section and a signal processing section. The detector outputs detection signals according to intensity of the X-rays received by detection elements, for each of the plurality of detection elements forming a detection surface. The virtual mask setting section is capable of setting a virtual mask on the detection surface of the detector, and setting at least an opening dimension of the virtual mask as an opening condition of the virtual mask independently in an X direction and a Y direction. The signal processing section processes the detection signals outputted from the detector according to the opening condition of the virtual mask set in the virtual mask setting section.
摘要翻译： 提供了一种X射线衍射装置，其被配置为使用X射线源产生的X射线照射在样品台上的样品S，并且使用检测器检测由样品衍射的X射线，所述检测器包括虚拟掩模设定部 和信号处理部。 检测器根据形成检测面的多个检测元件中的每一个根据检测元件所接收的X射线的强度输出检测信号。 虚拟掩模设置部分能够在检测器的检测表面上设置虚拟掩模，并且在X方向和Y方向上独立地设置虚拟掩模的至少开口尺寸作为虚拟掩模的打开条件。 所述信号处理部根据在所述虚拟掩模设定部中设定的所述虚拟掩模的打开条件，对从所述检测器输出的检测信号进行处理。
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