Treatment liquid production device and treatment liquid production method

    公开(公告)号:US10105673B2

    公开(公告)日:2018-10-23

    申请号:US14723504

    申请日:2015-05-28

    Abstract: A treatment liquid production device includes a first tank; a first plasma generating device that includes a first pair of electrodes and a first power supply, the first power supply applying a voltage between the first pair of electrodes, the first plasma generating device generating plasma in a liquid in the first tank; a second tank; a second plasma generating device that includes a second pair of electrodes and a second power supply, the second power supply applying a voltage between the second pair of electrodes, the second plasma generating device generating plasma in a liquid in the second tank; and a controller operative to produce a first treatment liquid having a high initial oxidizing power during a first period and a second treatment liquid having a high remaining oxidizing power during a second period which is longer than the first period.

Patent Agency Ranking