公开(公告)号：US20240342911A1

公开(公告)日：2024-10-17

申请号：US18588455

申请日：2024-02-27

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takashi SASASHIGE ,  Ryo OTSUJI

IPC: B25J9/16 ,  B25J11/00

CPC classification number: B25J9/1674 ,  B25J9/1653 ,  B25J11/0095

Abstract: The disclosed substrate transport apparatus includes a substrate storage portion that stores a substrate, a measurement portion including a rotation stage on which the substrate is to be placed and a sensor that measures the position of the outer edge of the substrate on the rotation stage, a transport portion that takes out a substrate from the substrate storage portion and places the substrate on the rotation stage, and an abnormality detection unit that detects an abnormality in the transport portion. The abnormality detection unit detects an abnormality in the transport portion based on measurement data acquired by the sensor while the rotation stage is rotated in the measurement portion.