公开(公告)号：US20200269357A1

公开(公告)日：2020-08-27

申请号：US16776929

申请日：2020-01-30

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKESHI OMORI ,  KAZUKI FUJIWARA ,  TAKAYUKI ATEGI ,  YOSHIRO KITAMURA

IPC: B23K26/53 ,  B23K26/082 ,  B23K26/03

Abstract: To reduce a width of a modified layer and suppress positional variation of the modified layer, a crystal orientation of a workpiece is measured, a vertical direction with respect to an A-plane of the measured crystal orientation of the workpiece is specified, and a polarization direction of laser light is adjusted so that scanning of laser light is performed along the specified vertical direction with respect to the A-plane of the crystal orientation of the workpiece.