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公开(公告)号:US20220178695A1
公开(公告)日:2022-06-09
申请号:US17599212
申请日:2020-03-05
Inventor: Shoichi TAJI , Hiroyuki AIZAWA , Soichiro HIRAOKA
IPC: G01C19/5733 , G01C19/5769
Abstract: An anchor member supports a frame-shaped member. A first input electrode is located outside the frame-shaped member and separate from the frame-shaped member and fixed to a substrate. A second input electrode includes an electrode portion located outside the frame-shaped member and connected to the frame-shaped member. The second input electrode is displaceable in a prescribed direction. A first reference electrode is inside the frame-shaped member and fixed to the substrate. A second reference electrode includes an electrode portion located inside of the frame-shaped member and connected to the frame-shaped member. The second reference electrode is displaceable in the prescribed direction. In the structural component, the first input electrode and the electrode portion of the second input electrode are located between the frame-shaped member and a weight member in the prescribed direction in plan view in a thickness direction defined with respect to the substrate.
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公开(公告)号:US20250091860A1
公开(公告)日:2025-03-20
申请号:US18628262
申请日:2024-04-05
Inventor: Hiroki SAKAMOTO , Soichiro HIRAOKA , Hideaki NISHIWAKI , Ritsu NAKAYOSHI , Natsuki MIYASHITA , Kouhei YAMADA
Abstract: A compound sensor includes a package, a first acceleration detector, a second acceleration detector, and an angular velocity detector. The first acceleration detector is disposed in a first cavity. The second acceleration detector is disposed in a second cavity. The angular velocity detector is disposed in a third cavity. An inner pressure of the first cavity is higher than an inner pressure of the second cavity. An inner pressure of the third cavity is lower than the inner pressure of the second cavity.
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公开(公告)号:US20160356984A1
公开(公告)日:2016-12-08
申请号:US15237247
申请日:2016-08-15
Inventor: Toshiaki HORIE , Soichiro HIRAOKA , Shinsuke NAKAZONO , Kazuki KOMAKI
CPC classification number: G03B21/008 , B81B3/00 , B81B3/0043 , B81B7/0067 , B81B2201/042 , G02B26/0858 , G02B26/105 , H04N9/3129
Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts is disposed in each of the pair of vibration parts, and rotates the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.
Abstract translation: 光反射装置包括镜部,一对接头,一对振动部,多个驱动部以及固定部。 每个接头具有在反射镜部分上彼此相对的相应位置的第一端和与第一端相对的第二端,并且沿着第一轴线延伸。 每个振动部分具有连接到相应的一个接头的第二端的中心部分。 在所述一对振动部的每一个上设置有多个驱动部,并且使所述镜部转动。 一对振动部的两端部与固定部连接。 被定义为与第一轴正交的方向上的每个接头的长度的梁宽度大于该对振动部分中的每一个的梁宽度。
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