ANGULAR VELOCITY SENSOR
    1.
    发明申请

    公开(公告)号:US20220178695A1

    公开(公告)日:2022-06-09

    申请号:US17599212

    申请日:2020-03-05

    Abstract: An anchor member supports a frame-shaped member. A first input electrode is located outside the frame-shaped member and separate from the frame-shaped member and fixed to a substrate. A second input electrode includes an electrode portion located outside the frame-shaped member and connected to the frame-shaped member. The second input electrode is displaceable in a prescribed direction. A first reference electrode is inside the frame-shaped member and fixed to the substrate. A second reference electrode includes an electrode portion located inside of the frame-shaped member and connected to the frame-shaped member. The second reference electrode is displaceable in the prescribed direction. In the structural component, the first input electrode and the electrode portion of the second input electrode are located between the frame-shaped member and a weight member in the prescribed direction in plan view in a thickness direction defined with respect to the substrate.

    OPTICAL ELEMENT
    3.
    发明申请
    OPTICAL ELEMENT 有权
    光学元件

    公开(公告)号:US20160356984A1

    公开(公告)日:2016-12-08

    申请号:US15237247

    申请日:2016-08-15

    Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts is disposed in each of the pair of vibration parts, and rotates the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.

    Abstract translation: 光反射装置包括镜部,一对接头,一对振动部,多个驱动部以及固定部。 每个接头具有在反射镜部分上彼此相对的相应位置的第一端和与第一端相对的第二端,并且沿着第一轴线延伸。 每个振动部分具有连接到相应的一个接头的第二端的中心部分。 在所述一对振动部的每一个上设置有多个驱动部,并且使所述镜部转动。 一对振动部的两端部与固定部连接。 被定义为与第一轴正交的方向上的每个接头的长度的梁宽度大于该对振动部分中的每一个的梁宽度。

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