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公开(公告)号:US20250091860A1
公开(公告)日:2025-03-20
申请号:US18628262
申请日:2024-04-05
Inventor: Hiroki SAKAMOTO , Soichiro HIRAOKA , Hideaki NISHIWAKI , Ritsu NAKAYOSHI , Natsuki MIYASHITA , Kouhei YAMADA
Abstract: A compound sensor includes a package, a first acceleration detector, a second acceleration detector, and an angular velocity detector. The first acceleration detector is disposed in a first cavity. The second acceleration detector is disposed in a second cavity. The angular velocity detector is disposed in a third cavity. An inner pressure of the first cavity is higher than an inner pressure of the second cavity. An inner pressure of the third cavity is lower than the inner pressure of the second cavity.