公开(公告)号：US20230398626A1

公开(公告)日：2023-12-14

申请号：US18303606

申请日：2023-04-20

申请人： Panasonic Intellectual Property Management Co., Ltd.

发明人： MITUHIRO YOSINAGA ,  MIZUHO ABE

IPC分类号： B23K26/03 ,  B23K26/067 ,  B23K26/06 ,  G01B11/22 ,  H02K15/00

CPC分类号： B23K26/032 ,  B23K26/067 ,  B23K26/0643 ,  B23K26/0648 ,  G01B11/22 ,  H02K15/0081

摘要： A laser processing device includes a first branching unit that branches laser light into first laser light emitted to a first processing point and second laser light emitted to a second processing point, an optical interferometer that emits measurement light having a wavelength different from a wavelength of the laser light, and generates an optical interference signal based on the measurement light, a lens that condenses the laser light and the measurement light, a first mirror that changes incident positions of the laser light and the measurement light on the lens, a second mirror that changes an incident position of the measurement light on the first mirror, a controller that controls an operation of the second mirror, and a measurement processing section that derives a depth of a keyhole based on the optical interference signal.