公开(公告)号：US09865470B2

公开(公告)日：2018-01-09

申请号：US15099590

申请日：2016-04-15

申请人： Panasonic Corporation

发明人： Yoshifumi Takasu ,  Nobuyuki Yokoyama ,  Isao Tashiro ,  Nobuyuki Kamikihara

IPC分类号： B24B21/12 ,  H01L21/306 ,  B24B37/04 ,  B24B37/11 ,  H01L21/687 ,  H01L21/67 ,  H01L21/268 ,  B24B21/06

CPC分类号： H01L21/30625 ,  B24B21/06 ,  B24B21/12 ,  B24B37/04 ,  B24B37/11 ,  H01L21/02024 ,  H01L21/2686 ,  H01L21/67115 ,  H01L21/68785

摘要： A processing apparatus includes a rotary table that causes a workpiece to rotate around a rotary axis, a roller-shaped member that rotates on an axis orthogonal to the rotary axis of the rotary table, a vertical driving section that is driven in a direction of the rotary axis of the rotary table so as to bring the roller-shaped member and the workpiece into contact with each other, an ultraviolet ray irradiation source that irradiates a portion between the roller-shaped member and the workpiece with an ultraviolet ray, a polishing material that is supplied to the portion between the roller-shaped member and the workpiece, and a light scattering medium that is supplied to the portion between the roller-shaped member and the workpiece and scatters an ultraviolet ray from the ultraviolet ray irradiation source.