公开(公告)号：US20240337544A1

公开(公告)日：2024-10-10

申请号：US18617813

申请日：2024-03-27

Applicant: POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION

Inventor： Sungjune JUNG ,  Youngmin JO ,  Sanghoon BAEK

IPC: G01L1/18 ,  G01K7/01

CPC classification number: G01L1/18 ,  G01K7/01

Abstract: Proposed is a three-dimensionally stacked multi-mode sensor for simultaneously detecting pressure and temperature. The multi-mode sensor includes a temperature sensor part including a first thin film transistor; and a pressure sensor part including a second thin film transistor and a piezoresistive layer stacked in a perpendicular direction on the temperature sensor part, the piezoresistive layer including a piezoresistive sheet. The multi-mode sensor can accurately detect pressure and temperature simultaneously without being affected by temperature changes.