- 专利标题: THREE-DIMENSIONALLY STACKED MULTI-MODAL SENSOR FOR SIMULTANEOUSLY DETECTING PRESSURE AND TEMPERATURE AND METHOD OF MANUFACTURING SAME
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申请号: US18617813申请日: 2024-03-27
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公开(公告)号: US20240337544A1公开(公告)日: 2024-10-10
- 发明人: Sungjune JUNG , Youngmin JO , Sanghoon BAEK
- 申请人: POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION
- 申请人地址: KR Pohang-si
- 专利权人: POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION
- 当前专利权人: POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION
- 当前专利权人地址: KR Pohang-si
- 优先权: KR 20230046264 2023.04.07
- 主分类号: G01L1/18
- IPC分类号: G01L1/18 ; G01K7/01
摘要:
Proposed is a three-dimensionally stacked multi-mode sensor for simultaneously detecting pressure and temperature. The multi-mode sensor includes a temperature sensor part including a first thin film transistor; and a pressure sensor part including a second thin film transistor and a piezoresistive layer stacked in a perpendicular direction on the temperature sensor part, the piezoresistive layer including a piezoresistive sheet. The multi-mode sensor can accurately detect pressure and temperature simultaneously without being affected by temperature changes.
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