公开(公告)号：US20140042022A1

公开(公告)日：2014-02-13

申请号：US13788081

申请日：2013-03-07

Applicant: PALMAZ SCIENTIFIC, INC.

Inventor： Tianzong Xu ,  George Xinsheng Guo ,  Oanh Nguyen

IPC: H01J23/02

CPC classification number: H01J23/02 ,  C23C14/35 ,  C23C14/566 ,  H01J37/3405 ,  H01J37/3417 ,  H01J37/342

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

Abstract translation: 本文公开了一种反相圆柱形磁控管（ICM）系统和使用方法，其通常包括同心地位于第一环形端阳极和第二环形端阳极内的同轴中心阳极; 处理室，其包括顶端和底端，其中第一环形端阳极和第二环形端阳极同轴设置，由此第一环​​形端阳极，第二环形端阳极和中心阳​​极形成3-阳极 配置以提供电场均匀性，并且处理室包括耦合到围绕中心环形空间壁设置的管绝缘体的中心环形空间; 同心耦合到管绝缘体和靶的阴极; 以及围绕处理室的外部的多个多区域电磁体或混合电永磁体，其提供可调磁场。

公开(公告)号：US09640359B2

公开(公告)日：2017-05-02

申请号：US13788081

申请日：2013-03-07

Applicant: Palmaz Scientific, Inc.

Inventor： Tianzong Xu ,  George Xinsheng Guo ,  Oanh Nguyen

IPC: C23C14/00 ,  C25B11/00 ,  C25B13/00 ,  H01J23/02 ,  C23C14/35 ,  H01J37/34 ,  C23C14/56

CPC classification number: H01J23/02 ,  C23C14/35 ,  C23C14/566 ,  H01J37/3405 ,  H01J37/3417 ,  H01J37/342

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.