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1.发明申请PATTERNED PERPENDICULAR MAGNETIC RECORDING MEDIUM WITH ULTRATHIN OXIDE FILM AND REDUCED SWITCHING FIELD DISTRIBUTION 有权具有超氧化物膜的图形磁性记录介质和减少的开关场分布公开(公告)号：US20120236694A1
公开(公告)日：2012-09-20
申请号：US13049124
申请日：2011-03-16
CPC分类号： G11B5/746 , G11B5/7325 , G11B5/855
摘要： A patterned perpendicular magnetic recording disk has a Co-alloy recording layer patterned into discrete data islands arranged in concentric tracks and exhibits a narrow switching field distribution (SFD). The disk includes a substrate, a NiTa alloy planarizing layer on the substrate, a nonmagnetic Ru-containing underlayer on the planarizing layer, an oxide-free Co alloy magnetic recording layer, and an ultrathin oxide film between the Ru-containing layer and the Co-alloy magnetic recording layer. The oxide film may be an oxide selected from a Ta-oxide, a Co-oxide and a Ti-oxide, and is ultrathin so that it may be considered a discontinuous film. The planarizing layer and ultrathin oxide film improve the growth homogeneity of the Co-alloy recording layer, so that the patterned disk with data islands shows significantly reduced SFD.
摘要翻译： 图案化的垂直磁记录盘具有图案化为离散数据岛的Co合金记录层，其布置在同心轨道中并呈现窄的开关场分布（SFD）。 该盘包括衬底，衬底上的NiTa合金平面化层，平坦化层上的非磁性含Ru底层，不含氧化物的Co合金磁记录层以及Ru含有层和Co之间的超薄氧化物膜 合金磁记录层。 氧化膜可以是选自Ta氧化物，Co氧化物和Ti氧化物的氧化物，并且是超薄的，因此可以认为是不连续的膜。 平坦化层和超薄氧化物膜改善了Co合金记录层的生长均匀性，使得具有数据岛的图案化盘显示出显着降低的SFD。
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2.发明申请METHOD FOR IMPROVING A PATTERNED PERPENDICULAR MAGNETIC RECORDING DISK WITH ANNEALING 有权用于改进带有退火的图形磁性记录磁盘的方法公开(公告)号：US20130270221A1
公开(公告)日：2013-10-17
申请号：US13449279
申请日：2012-04-17
申请人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
发明人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.
摘要翻译： 用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。 可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。 然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。 在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。 退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。 退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。
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3.发明授权Method for improving a patterned perpendicular magnetic recording disk with annealing 有权用于退火的图案化垂直磁记录盘的改进方法公开(公告)号：US09147423B2
公开(公告)日：2015-09-29
申请号：US13449279
申请日：2012-04-17
申请人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
发明人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.
摘要翻译： 用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。 可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。 然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。 在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。 退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。 退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。
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4.发明授权Patterned perpendicular magnetic recording disk drive and medium with patterned exchange bridge layer below the data islands 有权图案化的垂直磁记录磁盘驱动器和介质，在数据岛下方有图案交换桥接层公开(公告)号：US08541116B2
公开(公告)日：2013-09-24
申请号：US12906909
申请日：2010-10-18
申请人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
发明人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
IPC分类号： G11B5/66
CPC分类号： G11B5/855 , G11B5/746 , G11B2005/0021
摘要： A patterned perpendicular magnetic recording disk with discrete data islands of recording layer (RL) material includes a substrate, a patterned exchange bridge layer of magnetic material between the substrate and the islands, and an optional exchange-coupling control layer (CCL) between the exchange bridge layer and the islands. The exchange bridge layer has patterned pedestals below the islands. The exchange bridge layer controls exchange interactions between the RLs in adjacent islands to compensate the dipolar fields between islands, and the pedestals concentrate the flux from the write head. The disk may include a soft underlayer (SUL) of soft magnetically permeable material on the substrate and a nonmagnetic exchange break layer (EBL) on the SUL between the SUL and the exchange bridge layer. In a thermally-assisted recording (TAR) disk a heat sink layer may be located below the exchange bridge layer and the SUL may be optional.
摘要翻译： 具有记录层（RL）材料的离散数据岛的图案化垂直磁记录盘包括衬底，在衬底和岛之间的图案化的磁性材料交换桥接层，以及在交换器之间的任选的交换耦合控制层（CCL） 桥梁层和岛屿。 交换桥层在岛屿下方有图案化的基座。 交换桥接层控制相邻岛中的RL之间的交换相互作用以补偿岛之间的偶极场，并且基座集中来自写头的磁通。 盘可以包括在衬底上的软磁性可渗透材料的软底层（SUL）和在SUL和交换桥接层之间的SUL上的非磁性交换断层（EBL）。 在热辅助记录（TAR）盘中，散热层可以位于交换桥接层下方，并且SUL可以是可选的。
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5.发明授权Patterned perpendicular magnetic recording medium with ultrathin oxide film and reduced switching field distribution 有权具有超薄氧化膜的图案垂直磁记录介质和减少的开关场分布公开(公告)号：US08268461B1
公开(公告)日：2012-09-18
申请号：US13049124
申请日：2011-03-16
IPC分类号： G11B5/66
CPC分类号： G11B5/746 , G11B5/7325 , G11B5/855
摘要： A patterned perpendicular magnetic recording disk has a Co-alloy recording layer patterned into discrete data islands arranged in concentric tracks and exhibits a narrow switching field distribution (SFD). The disk includes a substrate, a NiTa alloy planarizing layer on the substrate, a nonmagnetic Ru-containing underlayer on the planarizing layer, an oxide-free Co alloy magnetic recording layer, and an ultrathin oxide film between the Ru-containing layer and the Co-alloy magnetic recording layer. The oxide film may be an oxide selected from a Ta-oxide, a Co-oxide and a Ti-oxide, and is ultrathin so that it may be considered a discontinuous film. The planarizing layer and ultrathin oxide film improve the growth homogeneity of the Co-alloy recording layer, so that the patterned disk with data islands shows significantly reduced SFD.
摘要翻译： 图案化的垂直磁记录盘具有图案化为离散数据岛的Co合金记录层，其布置在同心轨道中并呈现窄的开关场分布（SFD）。 该盘包括衬底，衬底上的NiTa合金平面化层，平坦化层上的非磁性含Ru底层，不含氧化物的Co合金磁记录层以及Ru含有层和Co之间的超薄氧化物膜 合金磁记录层。 氧化膜可以是选自Ta氧化物，Co氧化物和Ti氧化物的氧化物，并且是超薄的，因此可以认为是不连续的膜。 平坦化层和超薄氧化物膜改善了Co合金记录层的生长均匀性，使得具有数据岛的图案化盘显示出显着降低的SFD。
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6.发明申请PATTERNED PERPENDICULAR MAGNETIC RECORDING DISK DRIVE AND MEDIUM WITH PATTERNED EXCHANGE BRIDGE LAYER BELOW THE DATA ISLANDS 有权图形数字岛上的图形交换电路板图形磁记录磁盘驱动器和介质公开(公告)号：US20120092790A1
公开(公告)日：2012-04-19
申请号：US12906909
申请日：2010-10-18
申请人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
发明人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
CPC分类号： G11B5/855 , G11B5/746 , G11B2005/0021
摘要： A patterned perpendicular magnetic recording disk with discrete data islands of recording layer (RL) material includes a substrate, a patterned exchange bridge layer of magnetic material between the substrate and the islands, and an optional exchange-coupling control layer (CCL) between the exchange bridge layer and the islands. The exchange bridge layer has patterned pedestals below the islands. The exchange bridge layer controls exchange interactions between the RLs in adjacent islands to compensate the dipolar fields between islands, and the pedestals concentrate the flux from the write head. The disk may include a soft underlayer (SUL) of soft magnetically permeable material on the substrate and a nonmagnetic exchange break layer (EBL) on the SUL between the SUL and the exchange bridge layer. In a thermally-assisted recording (TAR) disk a heat sink layer may be located below the exchange bridge layer and the SUL may be optional.
摘要翻译： 具有记录层（RL）材料的离散数据岛的图案化垂直磁记录盘包括衬底，在衬底和岛之间的图案化的磁性材料交换桥接层，以及在交换器之间的任选的交换耦合控制层（CCL） 桥梁层和岛屿。 交换桥层在岛屿下方有图案化的基座。 交换桥接层控制相邻岛中的RL之间的交换相互作用以补偿岛之间的偶极场，并且基座集中来自写头的磁通。 盘可以包括在衬底上的软磁性可渗透材料的软底层（SUL）和在SUL和交换桥接层之间的SUL上的非磁性交换断层（EBL）。 在热辅助记录（TAR）盘中，散热层可以位于交换桥接层下方，并且SUL可以是可选的。
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7.发明申请公开(公告)号：US20080292907A1
公开(公告)日：2008-11-27
申请号：US11751823
申请日：2007-05-22
申请人： Andreas Klaus Berger , Eric E. Fullerton , Olav Hellwig , Byron Hassberg Lengsfield, III , Ernesto E. Marinero
发明人： Andreas Klaus Berger , Eric E. Fullerton , Olav Hellwig , Byron Hassberg Lengsfield, III , Ernesto E. Marinero
摘要： A patterned perpendicular magnetic recording medium has discrete magnetic islands, each of which has a recording layer (RL) structure that comprises two exchange-coupled ferromagnetic layers. The RL structure may be an “exchange-spring” RL structure with an upper ferromagnetic layer (MAG2), sometimes called the exchange-spring layer (ESL), ferromagnetically coupled to a lower ferromagnetic layer (MAG1), sometimes called the media layer (ML). The RL structure may also include a coupling layer (CL) between MAG1 and MAG2 that permits ferromagnetic coupling. The interlayer exchange coupling between MAG1 and MAG2 may be optimized, in part, by adjusting the materials and thickness of the CL. The RL structure may also include a ferromagnetic lateral coupling layer (LCL) that is in contact with at least one of MAG1 and MAG2 for mediating intergranular exchange coupling in the ferromagnetic layer or layers with which it is in contact (MAG2 or MAG1). The ferromagnetic alloy in the LCL has significantly greater intergranular exchange coupling than the ferromagnetic alloy with which it is in contact (MAG2 or MAG1).
摘要翻译： 图案化的垂直磁记录介质具有离散的磁岛，每个磁岛具有包含两个交换耦合的铁磁层的记录层（RL）结构。 RL结构可以是具有上铁磁层（MAG2）的“交换弹簧”RL结构，有时称为交换弹簧层（ESL），铁磁耦合到下铁磁层（MAG1），有时称为介质层 ML）。 RL结构还可以包括允许铁磁耦合的MAG1和MAG2之间的耦合层（CL）。 可以通过调整CL的材料和厚度来部分地优化MAG1和MAG2之间的层间交换耦合。 RL结构还可以包括与MAG1和MAG2中的至少一个接触的铁磁侧向耦合层（LCL），用于介导与其接触的铁磁层（MAG2或MAG1）中的晶间交换耦合。 LCL中的铁磁合金与其接触的铁磁合金（MAG2或MAG1）具有明显更大的晶间交换耦合。
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8.发明授权Perpendicular magnetic recording disk with multiple magnetic layers and intermediate dual nucleation films for control of grain size 有权具有多个磁性层的垂直磁记录盘和用于控制晶粒尺寸的中间双核成膜公开(公告)号：US09040180B2
公开(公告)日：2015-05-26
申请号：US13156272
申请日：2011-06-08
IPC分类号： G11B5/66
CPC分类号： G11B5/66 , G11B5/65 , G11B5/7325 , G11B5/82
摘要： A perpendicular magnetic recording disk has a graded-anisotropy recording layer (RL) formed of at least two ferromagnetically exchange coupled CoPtCr-oxide magnetic layers (MAG1 and MAG2) with two nucleation films (NF1 and NF2) between the magnetic layers. NF1 is a metal film, preferably Ru or a Ru-based alloy like RuCr, sputter deposited on MAG1 at low pressure to a thickness between about 0.1-1.5 nm. NF2 is a metal oxide film, preferably an oxide of Ta, sputter deposited on NF1 at high pressure to a thickness between about 0.2-1.0 nm. MAG2 is sputter deposited over NF2. NF1 and NF2 provide a significant reduction in average grain size in the RL from a graded-anisotropy RL without nucleation films between MAG1 and MAG2, while also assuring that MAG1 and MAG2 are strongly exchange coupled.
摘要翻译： 垂直磁记录盘具有由至少两个铁磁交换的CoPtCr-氧化物磁性层（MAG1和MAG2）与磁性层之间的两个成核膜（NF1和NF2）形成的渐变各向异性记录层（RL）。 NF1是金属膜，优选Ru或Ru基Ru合金，在低压下溅射沉积在MAG1上，厚度在约0.1-1.5nm之间。 NF2是金属氧化物膜，优选Ta的氧化物，在高压下溅射沉积在NF1上，厚度在约0.2-1.0nm之间。 MAG2溅射沉积在NF2上。 NF1和NF2从MAG1和MAG2之间没有成核膜的梯度各向异性RL提供RL中的平均晶粒尺寸的显着降低，同时还确保MAG1和MAG2强烈交换耦合。
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9.发明申请PERPENDICULAR MAGNETIC RECORDING DISK WITH MULTIPLE MAGNETIC LAYERS AND INTERMEDIATE DUAL NUCLEATION FILMS FOR CONTROL OF GRAIN SIZE 有权具有多个磁性层的全磁性记录磁盘和用于控制颗粒尺寸的中间双核芯片公开(公告)号：US20120315505A1
公开(公告)日：2012-12-13
申请号：US13156272
申请日：2011-06-08
CPC分类号： G11B5/66 , G11B5/65 , G11B5/7325 , G11B5/82
摘要： A perpendicular magnetic recording disk has a graded-anisotropy recording layer (RL) formed of at least two ferromagnetically exchange coupled CoPtCr-oxide magnetic layers (MAG1 and MAG2) with two nucleation films (NF1 and NF2) between the magnetic layers. NF1 is a metal film, preferably Ru or a Ru-based alloy like RuCr, sputter deposited on MAG1 at low pressure to a thickness between about 0.1-1.5 nm. NF2 is a metal oxide film, preferably an oxide of Ta, sputter deposited on NF1 at high pressure to a thickness between about 0.2-1.0 nm. MAG2 is sputter deposited over NF2. NF1 and NF2 provide a significant reduction in average grain size in the RL from a graded-anisotropy RL without nucleation films between MAG1 and MAG2, while also assuring that MAG1 and MAG2 are strongly exchange coupled.
摘要翻译： 垂直磁记录盘具有由至少两个铁磁交换的CoPtCr-氧化物磁性层（MAG1和MAG2）与磁性层之间的两个成核膜（NF1和NF2）形成的渐变各向异性记录层（RL）。 NF1是金属膜，优选Ru或Ru基Ru合金，在低压下溅射沉积在MAG1上，厚度在约0.1-1.5nm之间。 NF2是金属氧化物膜，优选Ta的氧化物，在高压下溅射沉积在NF1上，厚度在约0.2-1.0nm之间。 MAG2溅射沉积在NF2上。 NF1和NF2从MAG1和MAG2之间没有成核膜的梯度各向异性RL提供RL中的平均晶粒尺寸的显着降低，同时还确保MAG1和MAG2强烈交换耦合。
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10.发明授权Patterned perpendicular magnetic recording medium with multiple magnetic layers and interlayers 有权带有多个磁性层和夹层的图案垂直磁记录介质公开(公告)号：US08320232B1
公开(公告)日：2012-11-27
申请号：US13188384
申请日：2011-07-21
IPC分类号： G11B3/70
摘要： A patterned perpendicular magnetic recording medium has discrete data islands that have first and second ferromagnetic layers (MAG1 and MAG2) with first and second nonmagnetic interlayers (IL1 and IL2) between MAG1 and MAG2. MAG1 and MAG2 may be similar CoPtCr alloys with similar thicknesses, with thicknesses of IL1 and IL2 that assure that MAG1 and MAG2 are strongly exchange coupled. Alternatively, MAG2 may be a “write assist” layer, for example a high-saturation magnetization, magnetically soft material in an exchange-spring structure, with IL1 being very thin so that IL2 functions as the coupling layer between MAG1 and the write-assist MAG2 layer. In an application for thermally-assisted recording (TAR), MAG2 may be the chemically-ordered equiatomic binary alloy FePt or CoPt based on the L10 phase, with high magneto-crystalline anisotropy (Ku).
摘要翻译： 图案化的垂直磁记录介质具有离散数据岛，其具有MAG1和MAG2之间的第一和第二非磁性中间层（IL1和IL2）的第一和第二铁磁层（MAG1和MAG2）。 MAG1和MAG2可以是类似厚度的CoPtCr合金，具有IL1和IL2的厚度，以确保MAG1和MAG2被强耦合。 或者，MAG2可以是写辅助层，例如高饱和磁化，交换弹簧结构中的磁软材料，其中IL1非常薄，使得IL2用作MAG1和写辅助MAG2层之间的耦合层 。 在热辅助记录（TAR）的应用中，MAG2可以是基于L10相的具有高磁结晶各向异性（Ku）的化学有序的等原子二元合金FePt或CoPt。
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