公开(公告)号：US3784833A

公开(公告)日：1974-01-08

申请号：US3784833D

申请日：1972-07-11

Applicant: OLYMPUS OPTICAL CO

Inventor： KIMURA K

IPC: G01J3/18 ,  G01D5/38 ,  G01J3/12 ,  G01T1/00 ,  H01J39/02

CPC classification number: G01D5/38

Abstract: Apparatus for deriving diffractive rays by diffraction gratings which enables light measurement to be effected with high accuracy in addition to the feasibility of making the whole apparatus in a compact size. These features of the apparatus are obtained by the provision of a photoelectric element on the rear side of an index grating at a position in which it faces a movable scale grating with a small distance from this latter grating.

Abstract translation: 用于通过衍射光栅衍射衍射光的装置，除了使整个装置的尺寸紧凑的可行性之外，能够高精度地实现光测量。 该装置的这些特征是通过在索引光栅的后侧的一个位置上提供一个光电元件来获得的，该位置处于与后一个光栅小距离的可移动刻度格栅。