Method for manufacturing a one-piece silicon device with flexible blades, in particular for timepieces

    公开(公告)号:US11774914B2

    公开(公告)日:2023-10-03

    申请号:US17149112

    申请日:2021-01-14

    CPC classification number: G04D3/0069 G04B17/045

    Abstract: A one-piece silicon device with flexible blades (2, 3), in particular for timepieces, for example a pivot with crossed blades, and to a method for manufacturing the device (1). The method includes: forming (21) a one-piece silicon device (1) blank from a wafer of the SOI type, the device (1) including two flexible blades (2, 3), each formed in a different layer of the SOI wafer, the blades (2, 3) being arranged in two different substantially parallel planes, the blades (2, 3) being separated by a clearance (7); growing a first silicon oxide layer on the surface of at least one of the blades (2, 3) bordering the clearance, the first silicon oxide layer being formed from a first sub-layer of silicon of the one or more blades (2, 3); and removing the first silicon oxide layer to increase the clearance (7) between the two blades (2, 3).

    Coloured thermocompensated spiral and a method for the production thereof

    公开(公告)号:US11334025B2

    公开(公告)日:2022-05-17

    申请号:US16522206

    申请日:2019-07-25

    Abstract: A method for producing a thermocompensated and coloured coil spring including the steps of forming a first layer of silicon oxide on at least one face of the core and on at least one other face of the core, the first layer having a thickness equal to a fraction of the thickness required for achieving thermal compensation, removing the first layer from at least one face of the core, forming a second layer of silicon oxide on at least one face of the core and on at least one other face of the core, the second layer having a thickness equal to the remaining fraction of the thickness required for achieving thermal compensation which is lower than or equal to 1 μm for giving at least one face of the core a colour as a result of the interference effect.

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