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公开(公告)号:US20230069184A1
公开(公告)日:2023-03-02
申请号:US17894520
申请日:2022-08-24
发明人: Joshua A. SCHAFFSTALL , Dakota H. PEIRCE , Michael T. SABOL , Andrew DEVITT , Richard D. POLLICK
摘要: A non-contact air bearing having electrostatic discharge properties may comprise: a porous media element having a bearing surface; a supply line configured supply an externally pressurize gas or fluid to the porous media; and an electrostatic dissipative porous bearing layer on the bearing surface of the porous media element; wherein the externally pressurized fluid flows through the porous media element and creates a thin film between the electrostatic dissipative layer and a substrate supported by the air bearing.