INTEGRATED CIRCUIT WITH CO2 SENSOR, COMPOSITION AND MANUFACTURING METHOD OF SUCH AN IC
    1.
    发明申请
    INTEGRATED CIRCUIT WITH CO2 SENSOR, COMPOSITION AND MANUFACTURING METHOD OF SUCH AN IC 有权
    二氧化碳传感器的集成电路,这种IC的组成和制造方法

    公开(公告)号:US20150084100A1

    公开(公告)日:2015-03-26

    申请号:US14477453

    申请日:2014-09-04

    Applicant: NXP B.V.

    Abstract: Disclosed is an integrated circuit (100) comprising a semiconductor substrate (110) carrying a plurality of circuit elements (111); and a carbon dioxide sensor (120) over said semiconductor substrate, said sensor comprising a pair of electrodes (122, 124) laterally separated from each other; and a carbon dioxide (CO2) permeable polymer matrix (128) at least partially covering the pair of electrodes, said matrix encapsulating a liquid (126) comprising an organic alcohol and an organic amidine or guanidine base. A composition for forming such a CO2 sensor on the IC and a method of manufacturing such an IC are also disclosed.

    Abstract translation: 公开了一种包括承载多个电路元件(111)的半导体衬底(110)的集成电路(100)。 和在所述半导体衬底上的二氧化碳传感器(120),所述传感器包括彼此横向分离的一对电极(122,124); 和至少部分地覆盖所述一对电极的二氧化碳(CO 2)可渗透聚合物基体(128),所述基体封装包含有机醇和有机脒或胍碱的液体(126)。 还公开了一种用于在IC上形成这种CO 2传感器的组合物及其制造方法。

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