公开(公告)号：US20220230834A1

公开(公告)日：2022-07-21

申请号：US17577630

申请日：2022-01-18

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Satoshi NAKAHASHI ,  Nobuo MIYAMOTO ,  Takahito NAKAYAMA ,  Shunji SHINKAWA

IPC: H01J37/073 ,  H01J37/317

Abstract: An electron beam writing apparatus comprising, a cathode configured to emit an electron beam, a condition controller configured to change a condition under which the electron beam is emitted from the cathode in a plurality of ways, and a prediction unit configured to predict a life span of the cathode based on a temporal change in an amount of fluctuation of a beam characteristic of the electron beam to a change in the condition when the condition is changed.