公开(公告)号：US20170089842A1

公开(公告)日：2017-03-30

申请号：US15285892

申请日：2016-10-05

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Danny GROSSMAN ,  Guy SELICKTER

IPC: G01N21/88 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N2021/8848

Abstract: A control system and method are provided for use in managing optical measurements on target structures. The control system comprises: data input utility for receiving input data indicative of a size of a target structure to be measured and input data indicative of illumination and collection channels of an optical measurement system; data processing utility for analyzing the input data, and an interplay of Point Spread Functions (PSFs) of the illumination and collection channels, and determining data indicative of optional tailoring of apertures to be used in the optical measurement system for optimizing ensquared energy for measurements on the given target structure, the optimal tailoring composing at least one of the following: an optimal ratio between numerical apertures of the illumination and collection channels; and an optimal orientation offset of physical apertures in the illumination and collection channels.

公开(公告)号：US20160084773A1

公开(公告)日：2016-03-24

申请号：US14785896

申请日：2014-04-22

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Danny GROSSMAN ,  Guy SELICKTER

IPC: G01N21/88 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N2021/8848

Abstract: A control system and method are provided for use in managing optical measurements on target structures. The control system comprises: data input utility for receiving input data indicative of a size of a target structure to be measured and input data indicative of illumination and collection channels of an optical measurement system; data processing utility for analyzing the input data, and an interplay of Point Spread Functions (PSFs) of the illumination and collection channels, and determining data indicative of optimal tailoring of apertures to be used in the optical measurement system for optimizing ensquared energy for measurements on the given target structure, the optimal tailoring comprising at least one of the following: an optimal ratio between numerical apertures of the illumination and collection channels; and an optimal orientation offset of physical apertures in the illumination and collection channels.

Abstract translation: 提供了一种用于管理目标结构上的光学测量的控制系统和方法。 控制系统包括：用于接收表示要测量的目标结构的大小的输入数据的数据输入实用程序和指示光学测量系统的照明和收集通道的输入数据; 用于分析输入数据的数据处理实用程序，以及照明和采集通道的点扩散函数（PSF）的相互作用，以及确定指示在光学测量系统中使用的孔的最佳定制的数据，以优化用于测量的测量能量 给定的目标结构，最佳剪裁包括以下中的至少一个：照明和收集通道的数值孔径之间的最佳比率; 以及照明和收集通道中物理孔径的最佳取向偏移。