公开(公告)号：US20230044886A1

公开(公告)日：2023-02-09

申请号：US17759031

申请日：2020-11-24

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon YALOV ,  Gilad BARAK

IPC: G01J3/44 ,  G01J3/02

Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

公开(公告)号：US20210223179A1

公开(公告)日：2021-07-22

申请号：US17020587

申请日：2020-09-14

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Eyal Hollander ,  Gilad Barak ,  Elad Schleifer ,  Yonatan OREN ,  Amir Shayari

IPC: G01N21/65

Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up