公开(公告)号：US20220149811A1

公开(公告)日：2022-05-12

申请号：US17579678

申请日：2022-01-20

申请人： NGK INSULATORS, LTD.

发明人： Ryosuke HATTORI ,  Keiichiro ASAI ,  Tomoyoshi TAI ,  Yudai UNO

IPC分类号： H03H9/02 ,  H03H3/10 ,  H01L41/312

摘要： A bonded body includes a supporting substrate, piezoelectric material substrate and a multilayer film, between the supporting substrate and piezoelectric material substrate. The multilayer film includes a lamination structure having a first layer, second layer, third layer and fourth layer in the order. The first layer and third layer are composed of silicon oxides, and the second layer and fourth layer are composed of metal oxides. The refractive index of the second layer is higher than the refractive index of the first layer and refractive index of the third layer. The refractive index of the second layer is different from the refractive index of the fourth layer.

公开(公告)号：US20210066577A1

公开(公告)日：2021-03-04

申请号：US17097563

申请日：2020-11-13

申请人： NGK INSULATORS, LTD.

发明人： Tomoyoshi TAI ,  Ryosuke HATTORI

IPC分类号： H01L41/312 ,  H01L41/187 ,  H01L41/08

摘要： A bonded body includes a supporting substrate; a piezoelectric single crystal substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate; and an amorphous layer present between the supporting substrate and piezoelectric material substrate, and the amorphous layer contains one or more metal atom selected from the group consisting of niobium and tantalum, an atom constituting the supporting substrate and argon atom. A concentration of the argon atom in a central part of the amorphous layer is higher than a concentration of the argon atom in a peripheral part of the amorphous layer.

公开(公告)号：US20200373905A1

公开(公告)日：2020-11-26

申请号：US16991699

申请日：2020-08-12

申请人： NGK INSULATORS, LTD.

发明人： Tomoyoshi TAI ,  Ryosuke HATTORI

IPC分类号： H03H9/02 ,  H03H3/08 ,  H01L41/312 ,  H03H9/25

摘要： A bonded body includes a supporting substrate, a piezoelectric material substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate, and an amorphous layer present between the supporting substrate and piezoelectric material substrate. The amorphous layer contains one or more metal element selected from the group consisting of niobium and tantalum, an element constituting the supporting substrate and oxygen element. The concentration of the metal element in the amorphous layer is higher than the concentration of oxygen element and 20 to 65 atom %.

公开(公告)号：US20190284720A1

公开(公告)日：2019-09-19

申请号：US16366292

申请日：2019-03-27

申请人： NGK INSULATORS, LTD.

发明人： Ryosuke HATTORI ,  Shoichiro YAMAGUCHI ,  Hidetsugu SHIMOKATA

IPC分类号： C30B33/04 ,  G02F1/37 ,  G02F1/355 ,  C30B29/30

摘要： It is provided first electrode piece part-arrays each comprising a plurality of electrode piece parts on a first main face of a ferroelectric crystal substrate. A voltage is applied on the first electrode piece part-arrays to form first periodic polarization inversion structures. It is provided second electrode piece part-arrays each comprising a plurality of electrode piece parts between the adjacent plural first periodic polarization inversion structures. A voltage is applied on the second electrode piece part-arrays to form second polarization inversion structures.

公开(公告)号：US20220329230A1

公开(公告)日：2022-10-13

申请号：US17851230

申请日：2022-06-28

申请人： NGK INSULATORS, LTD.

发明人： Tomoyoshi TAI ,  Yudai UNO ,  Keiichiro ASAI ,  Ryosuke HATTORI ,  Masato NIWA ,  Masahiko NAMERIKAWA

IPC分类号： H03H9/17 ,  H01L41/047

摘要： A piezoelectric vibrating device includes a piezoelectric layer composed of a bulk piezoelectric material, a lower electrode on a first surface of the piezoelectric layer and a supporting substrate bonded with the lower electrode.

公开(公告)号：US20220155619A1

公开(公告)日：2022-05-19

申请号：US17649682

申请日：2022-02-02

申请人： NGK INSULATORS, LTD.

发明人： Ryosuke HATTORI ,  Tomoyoshi TAI ,  Keiichiro ASAI ,  Jungo KONDO

IPC分类号： G02F1/01

摘要： There is provided a composite substrate in which peeling is significantly suppressed, light propagation loss is small when used as an electro-optical element, and high-speed and low-voltage drive is possible, and which can achieve an extremely thin electro-optical element capable of maintaining excellent reliability even under a severe high-temperature environment. A composite substrate for an electro-optical element according to an embodiment of the present invention includes: an electro-optical crystal substrate having an electro-optical effect; a first high dielectric layer; a second high dielectric layer; and a support substrate in the stated order. The first high dielectric layer and the second high dielectric layer are directly joined to each other, and an amorphous layer is formed at a joining interface between the first high dielectric layer and the second high dielectric layer.