公开(公告)号：US20170030775A1

公开(公告)日：2017-02-02

申请号：US15302237

申请日：2015-04-04

Applicant: NEC Corporation

Inventor： Seiji KURASHINA ,  Masaru MIYOSHI

IPC: G01J5/10 ,  G01J5/08

CPC classification number: G01J5/10 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/0803 ,  G01J5/0809 ,  G01J5/20 ,  G01J2005/103

Abstract: A terahertz-wave detector having a thermal separation structure in which a temperature detection unit 14 including a bolometer thin film 7 connected to electrode wiring 9 is supported so as to be lifted above a substrate 2 by a support part 13 including the electrode wiring 9 connected to a reading circuit 2a formed on the substrate 2, wherein the terahertz-wave detector is provided with a reflective film 3 that is formed on the substrate 2 and reflects terahertz waves and an absorption film 11 that is formed on the temperature detection unit 14 and absorbs terahertz waves and the reflective film 3 is integrally formed with the reflective film of an adjacent terahertz-wave detector.

Abstract translation: 一种具有热分离结构的太赫兹波检测器，其中包括连接到电极布线9的测辐射热计薄膜7的温度检测单元14被支撑以通过包括连接的电极布线9的支撑部13提升到基板2上方 到形成在基板2上的读取电路2a，其中，太赫兹波检测器设置有形成在基板2上并反射太赫兹波的反射膜3和形成在温度检测单元14上的吸收膜11， 吸收太赫兹波，并且反射膜3与相邻的太赫兹波检测器的反射膜一体形成。

公开(公告)号：US20130306868A1

公开(公告)日：2013-11-21

申请号：US13845897

申请日：2013-03-18

Applicant: NEC CORPORATION

Inventor： Takao YAMAZAKI ,  Seiji KURASHINA

IPC: G01J5/04

CPC classification number: G01J5/045 ,  G01J5/048 ,  G01J5/061 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: According to the present invention, the gas adsorption capability of a getter can be maintained while the characteristics of an infrared ray sensor element are prevented from being deteriorated. An infrared ray sensor package has an infrared ray sensor element, a base substrate, a housing, an infrared ray transmission window, and a getter. The infrared ray sensor element is vacuum-sealed in a space surrounded by the base substrate, the housing, and the infrared ray transmission window. A spacer is disposed between the infrared ray sensor element and the base substrate to form a gap between the infrared ray sensor element and the base substrate. The getter is arranged in the gap formed between the infrared ray sensor element and the base substrate. A heat shielding member is disposed between the infrared ray sensor element and the getter. The heat shielding member is a heater for heating the infrared ray sensor element or an element formed of alloy containing Ni or heat-resistant glass.

Abstract translation: 根据本发明，可以保持吸气剂的气体吸附能力，同时防止红外线传感器元件的特性劣化。 红外线传感器封装具有红外线传感器元件，基底基板，外壳，红外线透射窗和吸气剂。 红外线传感器元件被真空密封在由基底基板，壳体和红外线透射窗包围的空间中。 在红外线传感器元件和基底基板之间设置间隔物，以在红外线传感器元件和基底基板之间形成间隙。 吸气剂布置在形成在红外线传感器元件和基底基板之间的间隙中。 在红外线传感器元件和吸气剂之间设置有热屏蔽构件。 隔热构件是用于加热红外线传感器元件的加热器或由含有Ni或耐热玻璃的合金形成的元件。