公开(公告)号：US20030143402A1

公开(公告)日：2003-07-31

申请号：US10304966

申请日：2002-11-27

Applicant: NATIONAL CHENG KUNG UNIVERSITY

Inventor： Min-Hsiung Hon ,  Jiann Shieh

IPC: B32B009/00 ,  C23C016/00 ,  H05H001/24

CPC classification number: C23C16/30 ,  Y10T428/30

Abstract: A nanocomposite having titanium aluminum carbon nitride and amorphous carbon is disclosed, and the nanocomposite comprises a titanium aluminum carbon nitride grain of nanometer scale and an amorphous carbon matrix, wherein the titanium aluminum carbon nitride grain of nanometer scale is embedded into the amorphous carbon matrix. The method for coating the nanocomposite of titanium aluminum carbon nitride-amorphous carbon on a substrate comprises: depositing the substrate in a reaction chamber; and igniting plasma to clean and remove an oxide layer and adsorptive on the substrate; injecting a reaction gas. The reaction gas is activated and thermal decomposed by plasma to form the nanocomposite coating layer of titanium aluminum carbon nitride-amorphous carbon on the surface of the substrate.

Abstract translation: 公开了具有氮化铝铝和无定形碳的纳米复合材料，并且纳米复合材料包括纳米级的钛铝氮化钛晶粒和无定形碳基体，其中将纳米级的钛铝氮化钛晶粒嵌入无定形碳基体中。 在衬底上涂覆钛铝碳氮化物 - 无定形碳的纳米复合材料的方法包括：将衬底沉积在反应室中; 并点燃等离子体以清洗和除去氧化物层并吸附在衬底上; 注入反应气体。 反应气体被激活并通过等离子体热分解以在衬底的表面上形成钛铝碳氮化物 - 无定形碳的纳米复合涂层。