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公开(公告)号：US20240223155A1
公开(公告)日：2024-07-04
申请号：US18394448
申请日：2023-12-22
发明人： John KOULAKIS , Drew Morosin
CPC分类号： H03H9/145 , H03H3/08 , H03H9/02543 , H03H9/25
摘要： An acoustic resonator is provided that includes a substrate; a piezoelectric layer having first and second surfaces that oppose each other with the second surface coupled to the substrate either directly or via one or more intermediate layers. The piezoelectric layer includes a diaphragm over a cavity extending in at least one of the substrate and the one or more intermediate layers. An interdigital transducer (IDT) is disposed at the piezoelectric layer and has interleaved fingers on the diaphragm. Moreover, first and second dielectric layers are disposed on opposing surfaces of the diaphragm, where the first and second dielectric layers have a first thickness and the piezoelectric layer has a second thickness greater than the first thickness. The first and second dielectric layers each comprise one of ZnS, HfN, HfO2, ZnO and Ta2O5, to improve an electrotechnical coupling of the acoustic resonator.
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公开(公告)号：US20240235525A9
公开(公告)日：2024-07-11
申请号：US18488277
申请日：2023-10-17
发明人： John KOULAKIS , Greg DYER , Sean MCHUGH , Patrick TURNER
CPC分类号： H03H9/174 , H03H9/02228 , H03H9/568
摘要： An apparatus for filtering radio frequency signals is provided. The apparatus includes a substrate and a membrane coupled to the substrate that includes piezoelectric material. The apparatus also includes an interdigital transducer (IDT) coupled to the membrane and includes a plurality of interleaved fingers. The apparatus also includes a lid, in which the membrane is arranged between the substrate and the lid with a first cavity having a first height between the lid and a first main surface of the membrane and a second cavity having a second height between the substrate and a second main surface of the membrane that opposes the first main surface. Moreover, the first height between the lid and the first main surface of the membrane is greater than a pitch of at least one pair of interleaved fingers of the plurality of interleaved fingers and at most four times greater than the second height.
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公开(公告)号：US20240137004A1
公开(公告)日：2024-04-25
申请号：US18488277
申请日：2023-10-16
发明人： John KOULAKIS , Greg DYER , Sean MCHUGH , Patrick TURNER
CPC分类号： H03H9/174 , H03H9/02228 , H03H9/568
摘要： An apparatus for filtering radio frequency signals is provided. The apparatus includes a substrate and a membrane coupled to the substrate that includes piezoelectric material. The apparatus also includes an interdigital transducer (IDT) coupled to the membrane and includes a plurality of interleaved fingers. The apparatus also includes a lid, in which the membrane is arranged between the substrate and the lid with a first cavity having a first height between the lid and a first main surface of the membrane and a second cavity having a second height between the substrate and a second main surface of the membrane that opposes the first main surface. Moreover, the first height between the lid and the first main surface of the membrane is greater than a pitch of at least one pair of interleaved fingers of the plurality of interleaved fingers and at most four times greater than the second height.
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4.发明公开公开(公告)号：US20230223915A1
公开(公告)日：2023-07-13
申请号：US18187376
申请日：2023-03-21
发明人： John KOULAKIS , William LU
CPC分类号： H03H9/02228 , H03H9/0014 , H03H9/02015
摘要： An acoustic resonator device includes a substrate having a surface; an 82Y-cut lithium niobate piezoelectric plate attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in an intermediate dielectric layer of the substrate; an interdigital transducer (IDT) at the piezoelectric plate such that interleaved fingers of the IDT are at the diaphragm; and a plurality of stripes of a dielectric material extending over ends of the interleaved fingers and portions of gaps between the ends of the interleaved fingers and opposing busbars of the IDT.
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