Microelectromechanical (MEMS) Scanners for Scanning Laser Devices

    公开(公告)号:US20210018746A1

    公开(公告)日:2021-01-21

    申请号:US16511546

    申请日:2019-07-15

    申请人: Microvision, Inc.

    发明人: Matthew Ellis

    IPC分类号: G02B26/08 G02B26/10 H02N2/02

    摘要: The embodiments described herein include scanners that can provide improved scanning laser devices. Specifically, the embodiments described herein provide scanners with a modular construction that includes one or more separately formed piezoelectric actuators coupled to a microelectromechanical system (MEMS) scan plate, flexure structures, and scanner frame. Such modular scanners can provide improved scanning laser devices, including scanning laser projectors and laser depth scanners, LIDAR systems, 3D motion sensing devices, gesture recognition devices, etc.

    Microelectromechanical (MEMS) scanners for scanning laser devices

    公开(公告)号:US11513341B2

    公开(公告)日:2022-11-29

    申请号:US16511546

    申请日:2019-07-15

    申请人: Microvision, Inc.

    发明人: Matthew Ellis

    摘要: The embodiments described herein include scanners that can provide improved scanning laser devices. Specifically, the embodiments described herein provide scanners with a modular construction that includes one or more separately formed piezoelectric actuators coupled to a microelectromechanical system (MEMS) scan plate, flexure structures, and scanner frame. Such modular scanners can provide improved scanning laser devices, including scanning laser projectors and laser depth scanners, LIDAR systems, 3D motion sensing devices, gesture recognition devices, etc.

    Scanning mirror system with attached magnet

    公开(公告)号:US11525896B2

    公开(公告)日:2022-12-13

    申请号:US16506829

    申请日:2019-07-09

    申请人: Microvision, Inc.

    发明人: Matthew Ellis

    摘要: A light detection and ranging system includes synchronously scanning transmit and receive mirrors that scan a pulsed fanned laser beam in two dimensions. Imaging optics image a receive aperture onto an arrayed receiver that includes a plurality of light sensitive devices. Scanning mirror assemblies include stationary coils and MEMS devices with attached mirrors and permanent magnets.

    Scanning Mirror System with Attached Magnet

    公开(公告)号:US20210011279A1

    公开(公告)日:2021-01-14

    申请号:US16506829

    申请日:2019-07-09

    申请人: Microvision, Inc.

    发明人: Matthew Ellis

    摘要: A light detection and ranging system includes synchronously scanning transmit and receive mirrors that scan a pulsed fanned laser beam in two dimensions. Imaging optics image a receive aperture onto an arrayed receiver that includes a plurality of light sensitive devices. Scanning mirror assemblies include stationary coils and MEMS devices with attached mirrors and permanent magnets.

    Compact modular scanners for scanning laser devices

    公开(公告)号:US10209510B2

    公开(公告)日:2019-02-19

    申请号:US15454856

    申请日:2017-03-09

    申请人: Microvision, Inc.

    摘要: The embodiments described herein provide scanners with a modular construction that includes a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure. Such modular scanners, when incorporated into laser scanning devices, reflect laser light into a pattern of scan lines. In general, the modular scanner includes a scan plate that is formed separately from the flexure structure. The scan plate and flexure structure each include coupling features that serve to couple the scan plate to the flexure structure. The flexure structure includes flexure arms that facilitate rotation of the scan plate to reflect laser light into a pattern of scan lines.