公开(公告)号：US06928333B1

公开(公告)日：2005-08-09

申请号：US09387174

申请日：1999-08-31

Applicant: Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

Inventor： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

IPC: G06F19/00 ,  G06Q10/00

CPC classification number: G06Q10/06 ,  Y02P90/86

Abstract: According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.

Abstract translation: 根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。 使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。

公开(公告)号：US6035245A

公开(公告)日：2000-03-07

申请号：US46854

申请日：1998-03-24

Applicant: Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

Inventor： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

IPC: G06Q10/08 ,  G06F17/00

CPC classification number: G06Q10/08 ,  Y10S414/14

Abstract: A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively. When a cassette is to be transported from the first stocker to the second stocker, the data processing system determines, as a function of the historical record of codes associated with the paths, which of the first or second paths is more likely to result in a lesser period of time in transporting the cassette, and selects one of the first or second paths according to which path is more likely to result in a lesser period of time in transporting the cassette. The robotic arrangement is then instructed to load the cassette on the vehicle of the selected path.

公开(公告)号：US06449522B1

公开(公告)日：2002-09-10

申请号：US09193349

申请日：1998-11-17

Applicant: Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

Inventor： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

IPC: G06F1900

CPC classification number: H01L21/67294 ,  H01L21/67276 ,  Y10S414/135 ,  Y10S414/137 ,  Y10S414/14

Abstract: Systems and methods for managing automated material handling systems, such as semiconductor fabrication facilities, using material item (e.g., wafer lot) attributes and cassette attributes are provided. A semiconductor fabrication facility typically includes multiple wafer lots and multiple cassettes for storing the wafer lots. A system and method, in one embodiment of the invention, includes setting one or more lot attributes for each wafer lot, setting one or more cassette attributes for each cassette, and selecting a particular cassette for holding a particular wafer lot based on the one or more wafer lot attributes of the particular wafer lot and the one or more cassette attributes of the particular cassette. The wafer lot and cassette attributes may, for example, include an attribute identifying a position in a fabrication sequence and one or more attributes indicative of one or more contaminants. By selecting cassettes in this manner, wafer lots and cassettes may, for example, be classified or logically zoned.

Abstract translation: 提供了用于管理自动化材料处理系统的系统和方法，例如半导体制造设施，使用材料项目（例如，晶片块）属性和盒子属性。 半导体制造设备通常包括多个晶片批次和用于存储晶片批次的多个盒。 在本发明的一个实施例中的系统和方法包括设置每个晶片批次的一个或多个批次属性，为每个盒设置一个或多个盒属性，并且基于该一个或多个盒子选择用于保持特定晶片批次的特定盒 特定晶片批次的更多晶片批次属性和特定盒的一个或多个盒属性。 晶片块和盒属性可以例如包括识别制造序列中的位置的属性和指示一种或多种污染物的一个或多个属性。 通过以这种方式选择盒式磁带，可以对晶片批次和磁带盒进行分类或逻辑划分。

公开(公告)号：US06411859B1

公开(公告)日：2002-06-25

申请号：US09143322

申请日：1998-08-28

Applicant: Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

Inventor： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

IPC: G06F1900

CPC classification number: H01L21/67276 ,  G05B19/41865 ,  G05B2219/32265 ,  G05B2219/32316 ,  Y02P90/20

Abstract: Techniques for controlling the flow of wafer lots in a semiconductor fabrication facility having multiple storage locations and a fabrication facility employing such techniques are provided. A process and system for controlling the flow of wafer lots within a semiconductor fabrication facility, in accordance with one embodiment of the invention, includes determining a first storage location for a wafer lot, determining, prior to moving the wafer lot, an availability condition of the first storage location based on a condition level of the first storage location and a priority of the wafer lot, and storing the wafer lot in the storage location if the location is available and storing the wafer lot in an alternate location if the storage location is unavailable. The storage location may, for example, be a stocker. In this manner, the invention may, for example, advantageously anticipate or sense bubbles or log jams of wafer lots in a fabrication facility and redirect wafer lots in order to avoid or reduce any bubble effect. This can, for example, significantly increase the throughput of wafers through the fabrication facility.

Abstract translation: 提供了用于控制具有多个存储位置的半导体制造设备中的晶片批次的流动的技术以及采用这种技术的制造设备。 根据本发明的一个实施例的用于控制半导体制造设备内的晶片批次的流动的工艺和系统包括确定晶片批次的第一存储位置，在移动晶片批之前确定可用状态 所述第一存储位置基于所述第一存储位置的状态级别和所述晶片批次的优先级，并且如果所述位置可用则将所述晶片批次存储在所述存储位置中，并且如果所述存储位置是所述存储位置，则将所述晶片批次存储在备用位置 不可用 存储位置可以例如是储存器。 以这种方式，本发明可以例如有利地预期或感测制造设施中的晶片批次的气泡或木材堵塞，并且重定向晶片批次以避免或减少任何气泡效应。 例如，这可以显着增加通过制造设备的晶片的生产量。

公开(公告)号：US07039495B1

公开(公告)日：2006-05-02

申请号：US09207282

申请日：1998-12-08

Applicant: Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

Inventor： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

IPC: G07F17/00

CPC classification number: H01L21/67276 ,  G05B19/41865 ,  G05B19/4189 ,  Y02P90/20 ,  Y02P90/28

Abstract: Management of multiple types of empty carriers in automated material handling systems. In one embodiment, an automated material handling system (AMHS) includes a plurality of material carriers including a plurality of empty carriers classified into two or more types and one or more stock areas, each including a plurality of bins for storing material carriers. Each stock area is associated with one or more thresholds for each empty carrier type. The AMHS further includes a control system coupled to a first one of the stock areas for computing an empty percentage for each empty carrier type. The empty percentage for a particular empty carrier type is the percentage of bins of the first one stock area which contain empty carriers of the particular type. The AMHS also includes a transportation system responsive to the control system for selectively moving an empty carrier of a certain carrier type between a staging area and the first stock area based on a comparison of the empty percentage for the certain carrier type to the one or more thresholds of the first stock area for the certain carrier type.

Abstract translation: 在自动化材料处理系统中管理多种类型的空载体。 在一个实施例中，自动材料处理系统（AMHS）包括多个材料载体，其包括分为两种或多种类型的多个空载体和一个或多个储备区域，每个储存区域包括用于储存材料载体的多个箱体。 每个库存区域与每个空载体类型的一个或多个阈值相关联。 AMHS还包括耦合到第一个存储区域的控制系统，用于计算每个空载波类型的空百分比。 特定空承运人类型的空百分比是包含特定类型的空承运人的第一个库存区的仓的百分比。 AMHS还包括响应于控制系统的运输系统，用于基于将特定载体类型的空百分比与一个或多个 特定承运人类型的第一库存区域的阈值。

公开(公告)号：US06356804B1

公开(公告)日：2002-03-12

申请号：US09519836

申请日：2000-03-06

Applicant: Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

Inventor： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

IPC: G06F700

CPC classification number: G06Q10/08 ,  Y10S414/14

Abstract: A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively. When a cassette is to be transported from the first stocker to the second stocker, the data processing system determines, as a function of the historical record of codes associated with the paths, which of the first or second paths is more likely to result in a lesser period of time in transporting the cassette, and selects one of the first or second paths according to which path is more likely to result in a lesser period of time in transporting the cassette. The robotic arrangement is then instructed to load the cassette on the vehicle of the selected path.

Abstract translation: 一种用于在多个路径之间选择用于在处理位置之间传送盒的计算机控制的制造布置和方法。 制造装置包括与轨道相互连接的多个储料器，盒子上载有车辆。 第一和第二储料器通过由轨道形成的至少第一路径和第二路径相互连接，并且盒可以通过两条路径中的任一条从第一储存器运送到第二储料架。 多个机器人装置构造成在储料器和车辆之间传送盒带。 数据处理系统耦合到机器人装置，并且被配置和布置为分别保持指示经由第一路径和第二路径将运送盒从第一储料器运送到第二储料器的时间段的代码的历史记录。 当盒子要从第一储盘器运送到第二储料器时，数据处理系统根据与路径相关联的代码的历史记录确定哪个第一或第二路径更有可能导致 较少的运送盒子的时间段，并且根据哪一个路径更可能导致运送盒式磁带的较短的时间段选择第一或第二路径之一。 然后指示机器人布置将盒装载到所选路径的车辆上。

公开(公告)号：US06338005B1

公开(公告)日：2002-01-08

申请号：US09387613

申请日：1999-08-31

Applicant: Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

Inventor： Michael R. Conboy ,  Patrick J. Ryan ,  Elfido Coss, Jr.

IPC: G06F700

CPC classification number: G06Q10/06

Abstract: Methods and systems for managing test wafers an automated material handling system are provided. Test material is classified into a plurality of classes. A time profile for each class of test material for a time period is determined and the test material is placed into cassettes based on the determined time profile for each class. When a request to pick up a particular group of a test material class is received, a cassette is identifying for picking up the particular group based on the contents of the cassette.

Abstract translation: 提供了用于管理测试晶片的方法和系统，其中包括自动化材料处理系统。 测试材料分为多个类别。 确定一段时间内每类测试材料的时间表，并根据每个类的确定的时间概况将测试材料放入盒中。 当接收到拾取特定组的测试材料类的请求时，盒式磁带正在识别以基于盒的内容拾取特定组。

公开(公告)号：US07200779B1

公开(公告)日：2007-04-03

申请号：US10133097

申请日：2002-04-26

Applicant: Elfido Coss, Jr. ,  Susan Hickey ,  Michael R. Conboy

Inventor： Elfido Coss, Jr. ,  Susan Hickey ,  Michael R. Conboy

IPC: G06F11/00

CPC classification number: G06F11/0769 ,  G06F11/0709 ,  G06F11/076 ,  G06F11/0781

Abstract: A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.

Abstract translation: 基于严重性级别提供了用于故障通知的方法和装置。 该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。

公开(公告)号：US07051250B1

公开(公告)日：2006-05-23

申请号：US10164091

申请日：2002-06-06

Applicant: Sam H. Allen, Jr. ,  Michael R. Conboy ,  Michael L. Miller ,  Elfido Coss, Jr.

Inventor： Sam H. Allen, Jr. ,  Michael R. Conboy ,  Michael L. Miller ,  Elfido Coss, Jr.

IPC: G06F11/00

CPC classification number: G05B19/4184 ,  G05B2219/31355 ,  G05B2219/31365 ,  G05B2219/32243 ,  G05B2219/32254 ,  Y02P90/14 ,  Y02P90/20

Abstract: A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.

Abstract translation: 提供了一种基于检测故障来路由工件的方法和装置。 该方法包括将工件路由到由调度系统识别的第一处理工具，检测与第一处理工具相关联的故障状况并通知调度系统检测到的故障状况。 该方法还包括响应于调度系统被通知故障状况而将第二工件路由到第二处理工具。

公开(公告)号：US06871112B1

公开(公告)日：2005-03-22

申请号：US09479852

申请日：2000-01-07

Applicant: Elfido Coss, Jr. ,  Michael R. Conboy ,  Bryce A. Hendrix

Inventor： Elfido Coss, Jr. ,  Michael R. Conboy ,  Bryce A. Hendrix

IPC: H01L21/02 ,  H01L21/66 ,  G06F19/00

CPC classification number: H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention is, in its various aspects, a method and apparatus for dynamically generating trace data reports in a semiconductor fabrication process employing fault detection control. The method comprises specifying data including at least one of a parameter, a trigger, and a frequency, for a trace data report; automatically generating from a fault detection controller a request including the specified data to a report generator; formulating the trace data report responsive to the request; and returning the formulated trace data report from the report generator based on the request. The apparatus is a semiconductor fabrication processing system, comprising: a fabrication tool capable of providing at least one of specified data and a trace data report; a fault detection controller capable of automatically generating a request for the trace data report, the request including the specified data; a report generator capable of requesting at least one of the specified data and the trace data report from the fabrication tool and capable of, if the specified data is requested from the fabrication tool, providing the trace data report; and an operator interface for receiving data specified for the trace data report, the specified data including at least one of a parameter, a trigger, and a frequency for the trace data report, and to which the trace data report may be returned from at least one of the report generator and the fabrication tool.

Abstract translation: 本发明在其各个方面是一种用于在采用故障检测控制的半导体制造过程中动态产生跟踪数据报告的方法和装置。 该方法包括指定用于跟踪数据报告的包括参数，触发和频率中的至少一个的数据; 从故障检测控制器自动生成包括指定数据的请求到报告生成器; 根据请求制定跟踪数据报告; 并根据请求从报告生成器返回已制定的跟踪数据报告。 该装置是半导体制造处理系统，包括：能够提供指定数据和跟踪数据报告中的至少一个的制造工具; 一个故障检测控制器，能够自动产生跟踪数据报告的请求，该请求包括指定的数据; 报告发生器，其能够从所述制造工具请求所述指定数据和跟踪数据报告中的至少一个，并且如果从所述制造工具请求指定的数据，则能够提供所述跟踪数据报告; 以及用于接收为跟踪数据报告指定的数据的操作者界面，所述指定数据包括用于跟踪数据报告的参数，触发和频率中的至少一个，并且跟踪数据报告至少可以从其返回 报告生成器和制作工具之一。