公开(公告)号：US20110198033A1

公开(公告)日：2011-08-18

申请号：US13027974

申请日：2011-02-15

Applicant: Masashi Tsujiyama

Inventor： Masashi Tsujiyama

IPC: C23F1/02 ,  C23C14/34 ,  B05C11/00

CPC classification number: H01J37/045 ,  H01J37/32495 ,  H01J37/32623 ,  H01J2237/3151

Abstract: A shutter device having two shutter plates, which shield between an IBS and a substrate, is configured such that the two shutter plates are disposed at symmetrical positions across the IBS and can perform an opening/closing operation in synchronization with a rotation of a rotation-link-member which is rotatably disposed surrounding the IBS. With the configuration, the shutter device can reduce an offset of a shield range in the opening/closing operation.

Abstract translation: 具有在IBS和基板之间屏蔽的两个快门板的快门装置被构造成使得两个快门板被布置在跨越IBS的对称位置处，并且可以与旋转轴线旋转同步地执行打开/关闭操作， 连接构件，其围绕IBS可旋转地设置。 利用该构造，快门装置可以减少打开/关闭操作中的屏蔽范围的偏移。