公开(公告)号：US20130298670A1

公开(公告)日：2013-11-14

申请号：US13759929

申请日：2013-02-05

Applicant: MITSUBISHI PRECISION CO., LTD.

Inventor： Masahiro Tsugai ,  Akitaka Uchimura ,  Syuji Nakashita

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5705 ,  G01C19/574

Abstract: A vibration gyro having a structure for canceling a quadrature error generated by structural asymmetricity due to production tolerance and a means for correcting a bias value when an angular velocity is zero. In order to apply a counter torque to a sense mass for canceling the quadrature error, left correction comb electrodes are fixed to a substrate adjacent to a left drive mass, and comb electrodes opposed to the correction comb electrodes are arranged on an inner portion of a frame member which constitutes the left drive mass. By applying DC voltage to the correction electrodes, electrostatic force, for canceling the leakage rotational displacement of the sense mass generated when the input angular velocity is zero, is generated.

Abstract translation: 一种振动陀螺仪，其具有用于消除由于制造公差引起的结构不对称性产生的正交误差的结构，以及当角速度为零时用于校正偏置值的装置。 为了将反转矩施加到用于消除正交误差的感测质量，左校正梳电极固定到与左驱动质量块相邻的衬底上，并且与校正梳电极相对的梳电极被布置在 构成左驱动质量的框架构件。 通过向校正电极施加直流电压，产生用于消除当输入角速度为零时产生的感测质量的泄漏旋转位移的静电力。

公开(公告)号：US09074889B2

公开(公告)日：2015-07-07

申请号：US13759929

申请日：2013-02-05

Applicant: MITSUBISHI PRECISION CO., LTD.

Inventor： Masahiro Tsugai ,  Akitaka Uchimura ,  Syuji Nakashita

IPC: G01C19/56 ,  G01C19/5705 ,  G01C19/574

CPC classification number: G01C19/56 ,  G01C19/5705 ,  G01C19/574

Abstract: A vibration gyro having a structure for canceling a quadrature error generated by structural asymmetricity due to production tolerance and a means for correcting a bias value when an angular velocity is zero. In order to apply a counter torque to a sense mass for canceling the quadrature error, left correction comb electrodes are fixed to a substrate adjacent to a left drive mass, and comb electrodes opposed to the correction comb electrodes are arranged on an inner portion of a frame member which constitutes the left drive mass. By applying DC voltage to the correction electrodes, electrostatic force, for canceling the leakage rotational displacement of the sense mass generated when the input angular velocity is zero, is generated.

Abstract translation: 一种振动陀螺仪，其具有用于消除由于制造公差引起的结构不对称性产生的正交误差的结构，以及当角速度为零时用于校正偏置值的装置。 为了将反转矩施加到用于消除正交误差的感测质量，左校正梳电极固定到与左驱动质量块相邻的衬底上，并且与校正梳电极相对的梳电极被布置在 构成左驱动块的框架构件。 通过向校正电极施加直流电压，产生用于消除当输入角速度为零时产生的感测质量的泄漏旋转位移的静电力。