VERTICAL CAVITY SURFACE EMITTING LASER DESIGN WITH SHORTER OXIDATION LENGTH AND/OR LARGER NUMBER OF TRENCHES

    公开(公告)号:US20220200240A1

    公开(公告)日:2022-06-23

    申请号:US17188701

    申请日:2021-03-01

    Abstract: In some implementations, a surface emitting laser may have an emitter design with a short oxidation length and/or a large number of trenches. For example, the surface emitting laser may comprise a metallization layer comprising multiple extended portions extending outwards from a circumference of an inner ring portion, and multiple tabs extending laterally from the multiple extended portions in a partial ring shape. The surface emitting laser may further comprise multiple via openings connecting the metallization layer to a plating metal, where each via opening is positioned over a corresponding tab, of the multiple tabs. The surface emitting laser may comprise multiple oxidation trenches that are each formed in an angular gap between a pair of extended portions, of the multiple extended portions, such that the multiple tabs and the multiple via openings are exclusively outside outer radii of the multiple oxidation trenches.

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