公开(公告)号：US20240222151A1

公开(公告)日：2024-07-04

申请号：US18557043

申请日：2022-04-28

申请人： Lam Research Corporation

发明人： Eli Jeon ,  Michael Philip Roberts ,  Douglas Walter Agnew ,  Daniel Boatright ,  Arun Anandhan Duraisamy ,  Joseph R. Abel ,  William Laurence McDaniel

IPC分类号： H01L21/67

CPC分类号： H01L21/67017

摘要： The present disclosure relates to a system for a semiconductor processing. The system includes a semiconductor processing chamber having a plurality of processing stations, a plurality of manifold trunks, a plurality of valves, and a plurality of fluid manifolds. Each manifold trunk includes an outlet, a common flowpath, a plurality of trunk inlets, a plurality of orifices, and a plurality of valve interfaces.