公开(公告)号：US20210384029A1

公开(公告)日：2021-12-09

申请号：US17045629

申请日：2019-04-08

申请人： Lam Research Corporation

发明人： Jeremy D. Fields ,  Awnish Gupta ,  Douglas W. Agnew ,  Joseph R. Abel ,  Purushottam Kumar

IPC分类号： H01L21/02 ,  H01L21/027 ,  H01J37/32 ,  C23C16/455 ,  G03F7/16

摘要： Methods and apparatuses for modifying a wafer surface using an organosilicon precursor are provided herein. The wafer surface is dosed with the organosilicon precursor following deposition of a dielectric material by an atomic layer deposition (ALD) process. In some implementations, the dielectric layer is made of silicon oxide. Dosing the wafer surface with the organosilicon precursor may occur in the same chamber as the ALD process. The organosilicon precursor may modify the wafer surface to increase its hydrophobicity so that photoresist adhesion is improved on the wafer surface. In some implementations, the wafer surface may be exposed to an inert gas RF plasma after dosing the wafer surface with the organosilicon precursor.