公开(公告)号：US20230317445A1

公开(公告)日：2023-10-05

申请号：US18042078

申请日：2021-08-13

Applicant: Lam Research Corporation

Inventor： Xuefeng Hua ,  Jack Chen ,  Ian Scot Latchford ,  Chia-Shin Lin ,  Chanthavisa Keovisai

IPC: H01L21/02 ,  H01L21/321 ,  H01L21/66

CPC classification number: H01L21/02021 ,  H01L21/02274 ,  H01L21/3212 ,  H01L22/12 ,  H01L21/02019 ,  H01L21/02164

Abstract: Semiconductor processing methods and apparatuses are provided. Some methods include providing a first wafer to a processing chamber, the first wafer having a thickness, a beveled edge, a first side, and a plurality of devices formed in a device area on the first side, the device area having an outer perimeter, depositing an annular ring of material on the first wafer, the annular ring of material covering a region of the beveled edge and the outer perimeter of the device area, and having an inner boundary closer to the center point of the first wafer than the outer perimeter, bonding a second substrate to the plurality of devices and to a portion of the annular ring of material, and thinning the thickness of the first wafer.