公开(公告)号：US09601320B2

公开(公告)日：2017-03-21

申请号：US14389340

申请日：2013-03-28

申请人： LASER SYSTEMS & SOLUTIONS OF EUROPE

发明人： Marc Mestres ,  Paul Ceccato

IPC分类号： H01J47/02 ,  H05G2/00 ,  H01S3/0977

CPC分类号： H01J47/026 ,  H01S3/09775 ,  H05G2/003 ,  H05G2/008

摘要： A method for stabilizing a plasma is disclosed. The method includes (a) providing in an ionization chamber a number of high voltage wires and a gas suitable for forming a plasma, and (b) exposing the gas to a high voltage thereby igniting the gas to form the plasma. Upon ignition, the plasma is subjected to an amount of light. A use of the method to generate X-rays is also disclosed. The invention is further directed to an ionization chamber including (a) a gas suitable for forming a plasma, and (b) a number of high voltage wires for exposing the gas to a high voltage thereby igniting the gas to form the plasma. The ionization chamber includes a device for subjecting the plasma upon ignition to an amount of light. The invention relates to an X-ray generator including such ionization chamber and to a laser apparatus including such X-ray generator.