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公开(公告)号:US07610674B2
公开(公告)日:2009-11-03
申请号:US11352676
申请日:2006-02-13
申请人: Kunliang Zhang , Daniel G Abels , Min Li , Yu-Hsia Chen
发明人: Kunliang Zhang , Daniel G Abels , Min Li , Yu-Hsia Chen
CPC分类号: G11B5/398 , B82Y25/00 , G01R33/093 , G11B5/3906 , H01L43/08 , H01L43/12 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要: Concerns about inadequate electromigration robustness in CCP CPP GMR devices have been overcome by adding magnesium to the current confining structures that are presently in use. In one embodiment the alumina layer, in which the current carrying copper regions are embedded, is fully replaced by a magnesia layer. In other embodiments, alumina is still used but a layer of magnesium is included within the structure before it is subjected to ion assisted oxidation.
摘要翻译: 通过向当前使用的当前限制结构添加镁,克服了对CCP CPP GMR器件的电迁移鲁棒性不足的担忧。 在一个实施例中,其中载流电铜区域的氧化铝层被氧化镁层完全替代。 在其它实施方案中,仍然使用氧化铝,但在进行离子辅助氧化之前,该结构中包含一层镁。