公开(公告)号：US11719664B2

公开(公告)日：2023-08-08

申请号：US16552120

申请日：2019-08-27

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Yeon Sik Jung ,  Hyeuk Jin Han ,  Seunghee Cho ,  Gyurac Lee

IPC: G01N27/27 ,  H01L29/41 ,  G01N21/65 ,  H01J37/26

CPC classification number: G01N27/27 ,  G01N21/658 ,  H01L29/413 ,  H01J37/26

Abstract: A multimodal sensor of high sensitivity and high selectivity using multifunctional three-dimensional nanostructure having electric and optical sensing ability and a method thereof are provided. The method includes forming multi-layered nanowires including a multifunctional material, transferring the nanowires to a plurality of layers onto a target substrate to form the three-dimensional nanostructure, heat-treating the three-dimensional nanostructure, and forming electrode layers at the three-dimensional nanostructure.