公开(公告)号：US20180266898A1

公开(公告)日：2018-09-20

申请号：US15890898

申请日：2018-02-07

Applicant: Korea Advanced Institute of Science And Technology

Inventor： Jun-Bo YOON ,  Jae-young Yoo ,  Min-Ho Seo

IPC: G01L1/14

CPC classification number: G01L1/146

Abstract: A pressure sensor including laterally arranged electrodes on a coplanar surface and a method of fabricating the pressure sensor are provided. The pressure sensor includes: a substrate whose top surface is formed in the form of a projection; a first electrode which is formed on one side of the top surface of the substrate; a second electrode which is formed on the other side of the top surface of the substrate and is spaced apart from the first electrode; and a dielectric material layer which is formed on the top surface of the substrate and fills a space between the first electrode and the second electrode. A pressure applied in a direction perpendicular to the top surface of the substrate causes a change in the dielectric constant of the dielectric material layer. The magnitude of the pressure is sensed by detecting a capacitance which changes according to the change in the dielectric constant.