公开(公告)号：US20180374740A1

公开(公告)日：2018-12-27

申请号：US16117328

申请日：2018-08-30

Applicant: Kokusai Electric Corporation

Inventor： Takayuki SATO ,  Naoya MATSUURA

IPC: H01L21/687 ,  H01L21/67 ,  H01J37/32

Abstract: Described herein is a technique capable of preventing a susceptor made of quartz from being damaged by contacting a reflector deformed by thermal expansion. A substrate support according to the technique may include an upper susceptor made of quartz; a lower susceptor made of quartz; and a reflector reflecting heat and made of a metal in a planar shape. A lower surface of the upper susceptor is bonded with an upper surface of the lower susceptor such that the reflector is interposed therebetween, a first recess accommodating the reflector is provided at the upper surface of the lower susceptor, and a portion of the lower surface of the upper susceptor facing the first recess is roughened.