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公开(公告)号：US20200088829A1
公开(公告)日：2020-03-19
申请号：US16506458
申请日：2019-07-09
Applicant: Keysight Technologies, Inc.
Inventor： Douglas Michael Baney
Abstract: Illustrative systems and methods disclosed herein pertain to calibrating a wafer inspection apparatus. In one exemplary embodiment, a calibration system includes a wafer emulator in the form of a substrate having a first porthole extending from a bottom major surface of the substrate to a top major surface of the substrate. The first porthole accommodates a fixture that holds an optical fiber such that a proximal end of the optical fiber is coplanar to the top major surface of the substrate. The optical fiber has a light emitting profile that emulates a beam profile of a semiconductor laser element. A laser transmitter is coupled to a distal end of the optical fiber and propagates a laser beam through the optical fiber and out of the proximal end of the optical fiber. The wafer inspection apparatus is arranged to receive the laser beam and use the laser beam for calibration purposes.
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公开(公告)号：US11061099B2
公开(公告)日：2021-07-13
申请号：US16506458
申请日：2019-07-09
Applicant: Keysight Technologies, Inc.
Inventor： Douglas Michael Baney
Abstract: Illustrative systems and methods disclosed herein pertain to calibrating a wafer inspection apparatus. In one exemplary embodiment, a calibration system includes a wafer emulator in the form of a substrate having a first porthole extending from a bottom major surface of the substrate to a top major surface of the substrate. The first porthole accommodates a fixture that holds an optical fiber such that a proximal end of the optical fiber is coplanar to the top major surface of the substrate. The optical fiber has a light emitting profile that emulates a beam profile of a semiconductor laser element. A laser transmitter is coupled to a distal end of the optical fiber and propagates a laser beam through the optical fiber and out of the proximal end of the optical fiber. The wafer inspection apparatus is arranged to receive the laser beam and use the laser beam for calibration purposes.
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公开(公告)号：US20190242755A1
公开(公告)日：2019-08-08
申请号：US15887994
申请日：2018-02-03
Applicant: Keysight Technologies, Inc.
Inventor： Gregory Steven Lee , Douglas Michael Baney , Todd Steven Marshall , Gregory Douglas VanWiggeren
Abstract: Illustrative embodiments disclosed herein pertain to a thermal imaging system that includes a thermal imaging sheet having an array of thermal unit cells for generating a thermal footprint in response to receiving an RF signal. The thermal footprint is composed of an array of hotspots having a first set of hotspots indicative of a radiation characteristic of a first polarization component of the RF signal, and a second set of hotspots indicative of a radiation characteristic of a second polarization component of the RF signal. Each thermal unit cell includes a first RF antenna and a second RF antenna oriented orthogonal with respect to each other. The first RF antenna includes a terminating resistor that generates a hotspot among the first set of hotspots and the second RF antenna includes another terminating resistor that generates a hotspot in the second set of hotspots.
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公开(公告)号：US10458851B2
公开(公告)日：2019-10-29
申请号：US15887994
申请日：2018-02-03
Applicant: Keysight Technologies, Inc.
Inventor： Gregory Steven Lee , Douglas Michael Baney , Todd Steven Marshall , Gregory Douglas VanWiggeren
Abstract: Illustrative embodiments disclosed herein pertain to a thermal imaging system that includes a thermal imaging sheet having an array of thermal unit cells for generating a thermal footprint in response to receiving an RF signal. The thermal footprint is composed of an array of hotspots having a first set of hotspots indicative of a radiation characteristic of a first polarization component of the RF signal, and a second set of hotspots indicative of a radiation characteristic of a second polarization component of the RF signal. Each thermal unit cell includes a first RF antenna and a second RF antenna oriented orthogonal with respect to each other. The first RF antenna includes a terminating resistor that generates a hotspot among the first set of hotspots and the second RF antenna includes another terminating resistor that generates a hotspot in the second set of hotspots.
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