公开(公告)号：US20210091344A1

公开(公告)日：2021-03-25

申请号：US17025395

申请日：2020-09-18

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： KyungCheol CHOI ,  Hyunjoo LEE ,  MiKyung KIM ,  Somin LEE

IPC: H01L51/56 ,  H01L51/52 ,  H01L51/00

Abstract: Disclosed are a probe integrated with an organic light source and a manufacturing method thereof. An organic light source integration method includes forming a first thin film encapsulation layer on a probe shank, depositing a first electrode in a first region on the first thin film encapsulation layer, depositing an insulating layer in a second region on the first thin film encapsulation layer, depositing a light emitting layer on the first electrode and the insulating layer, depositing a second electrode on the light emitting layer, and forming a second thin film encapsulation layer on the second electrode.