公开(公告)号：US20240102859A1

公开(公告)日：2024-03-28

申请号：US18010430

申请日：2022-09-07

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Ki Hun Jeong ,  Jung Woo Park ,  Jae Hun Jeon ,  Gi Beom Kim

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/0259 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/04 ,  G01J3/18 ,  G01J3/2803

Abstract: The disclosure relates to an ultrathin micro-spectrometer and a method of manufacturing the same, and more particularly, relates to an ultrathin micro-spectrometer including: a lens portion including: a convex lens; and a back-reflection grating layer which is formed on a rear surface of the convex lens and on the same surface of which a reflective diffraction grating and a first planar reflector are arranged; a substrate layer which is disposed to be spaced apart from the lens portion and on which a light incidence microslit is formed; a second planar reflector which is formed on the substrate layer; and a complementary metal-oxide-semiconductor (CMOS) sensor on which light reflected by the lens portion is focused, and a method of manufacturing the same.