公开(公告)号：US20140349085A1

公开(公告)日：2014-11-27

申请号：US14097971

申请日：2013-12-05

Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： SeokWoo Jeon ,  ChangUi Ahn

IPC: B29C63/00

CPC classification number: B01D67/0039 ,  B01D67/0062 ,  B01D71/024 ,  Y10T428/24802

Abstract: The present invention is 3D nanostructured porous metal oxide and the method of fabricating said metal oxide, wherein said method is comprising the steps of: (a) spin-coating with photoresist onto substrate; (b) forming periodic 3D porous nanostructure patterned pore in said photoresist using proximity-field nanopatterning; (c) impregnating metal oxide into said 3D pore of photoresist having said periodic 3D pore pattern as template via atomic layered deposition (ALD) with metal precursor; and (d) obtaining 3D nanostructured porous metal oxide having the inverse shape of said template by removing said photoresist template.

Abstract translation: 本发明是3D纳米结构多孔金属氧化物和制造所述金属氧化物的方法，其中所述方法包括以下步骤：（a）将光致抗蚀剂旋涂到基底上; （b）使用接近场纳米图案在所述光致抗蚀剂中形成周期性的3D多孔纳米结构图案孔; （c）通过具有金属前体的原子层状沉积（ALD）将金属氧化物浸渍到具有所述周期性3D孔隙图案的光致抗蚀剂的3D孔中作为模板; 和（d）通过去除所述光致抗蚀剂模板获得具有所述模板的倒数形状的3D纳米结构多孔金属氧化物。