公开(公告)号：US20240242986A1

公开(公告)日：2024-07-18

申请号：US18398292

申请日：2023-12-28

申请人： Kokusai Electric Corporation

发明人： Kento Nakanishi ,  Hideto Yamaguchi ,  Seiya Shigematsu

IPC分类号： H01L21/67

CPC分类号： H01L21/67248 ,  H01L21/67253

摘要： According to one embodiment of the present disclosure, there is provided a technique of controlling a temperature of a substrate by using a moving average value calculated by performing a moving average process on temperature values detected by a temperature sensor installed to be rotatable together with a holder configured to hold the substrate.

公开(公告)号：US11049742B2

公开(公告)日：2021-06-29

申请号：US16531540

申请日：2019-08-05

申请人： KOKUSAI ELECTRIC CORPORATION

发明人： Hideto Yamaguchi ,  Tetsuya Kosugi ,  Masaaki Ueno

IPC分类号： C23C16/00 ,  H01L21/67 ,  G01K7/02 ,  H01L21/66

摘要： A substrate processing apparatus includes: a reaction tube configured to accommodate a substrate holder holding a plurality of substrates and process a substrate held on the substrate holder; a heating unit installed outside the reaction tube and configured to heat an inside of the reaction tube; a protection tube installed to extend in a vertical direction in contact with an outer wall of the reaction tube; an insulating tube disposed inside the protection tube and having through-holes extending in a vertical direction; a thermocouple having a thermocouple junction provided at an upper end thereof, and thermocouple wires joined at the thermocouple junction and inserted into the through-holes of the insulating tube; a gas supply unit configured to supply a gas, for processing a substrate accommodated in the reaction tube, into the reaction tube; and an exhaust unit configured to exhaust a gas from the reaction tube.

公开(公告)号：US20240319021A1

公开(公告)日：2024-09-26

申请号：US18591209

申请日：2024-02-29

申请人： Kokusai Electric Corporation

发明人： Kento NAKANISHI ,  Hideto Yamaguchi

IPC分类号： G01K7/42 ,  G01K7/04 ,  H01L21/66 ,  H01L21/67

CPC分类号： G01K7/427 ,  G01K7/04 ,  H01L21/67248 ,  H01L22/12

摘要： There is provided a technique that includes: a heater arranged in each of a plurality of zones; at least one first temperature sensor configured to be capable of operating in conjunction with at least one substrate; another temperature sensor aside from the at least one first temperature sensor; and a controller configured to be capable of controlling the heater based on a temperature detected by either the at least one first temperature sensor or the another temperature sensor, wherein the either the at least one first temperature sensor or the another temperature sensor is assigned to each of the plurality of zones.

公开(公告)号：US12050138B2

公开(公告)日：2024-07-30

申请号：US17532426

申请日：2021-11-22

申请人： KOKUSAI ELECTRIC CORPORATION

发明人： Akihiro Osaka ,  Hideto Yamaguchi ,  Tetsuya Kosugi ,  Tokunobu Akao ,  Atsushi Umekawa ,  Motoya Takewaki

IPC分类号： G01K1/08 ,  G01K1/14 ,  G01K7/02 ,  H01L21/22 ,  H01L21/324 ,  H01L21/66 ,  H01L21/67

CPC分类号： G01K1/08 ,  G01K1/14 ,  G01K7/02 ,  H01L21/22 ,  H01L21/324 ,  H01L21/67098 ,  H01L21/67248 ,  H01L22/12

摘要： A thermocouple includes: a temperature measuring portion configured to measure an internal temperature of a reaction tube; a main body portion provided therein with a wire which constitutes the temperature measuring portion; and a cushioning portion attached to the main body portion at least in the vicinity of the temperature measuring portion, wherein the thermocouple is fixed to an outer surface of the reaction tube in a state in which the thermocouple makes contact with the reaction tube through the cushioning portion.

公开(公告)号：US11300456B2

公开(公告)日：2022-04-12

申请号：US16685643

申请日：2019-11-15

申请人： KOKUSAI ELECTRIC CORPORATION

发明人： Akihiro Osaka ,  Hideto Yamaguchi ,  Tetsuya Kosugi ,  Tokunobu Akao ,  Atsushi Umekawa ,  Motoya Takewaki

IPC分类号： G01K1/08 ,  G01K1/14 ,  G01K7/02

摘要： A thermocouple includes: a temperature measuring portion configured to measure an internal temperature of a reaction tube; a main body portion provided therein with a wire which constitutes the temperature measuring portion; and a cushioning portion attached to the main body portion at least in the vicinity of the temperature measuring portion, wherein the thermocouple is fixed to an outer surface of the reaction tube in a state in which the thermocouple makes contact with the reaction tube through the cushioning portion.

公开(公告)号：US11158529B2

公开(公告)日：2021-10-26

申请号：US16283418

申请日：2019-02-22

申请人： KOKUSAI ELECTRIC CORPORATION

发明人： Hideto Yamaguchi ,  Masashi Sugishita

IPC分类号： G05B13/02 ,  H01L21/67 ,  H01L21/66 ,  F27B17/00 ,  F27D19/00

摘要： There is provided a technique that includes (a) acquiring temperature data of at least one of a heater temperature defined by a temperature of a heater and a furnace temperature defined by an inner temperature of a process chamber, and acquiring a power supply value indicating an electric power supplied to the heater; (b) acquiring a reference temperature of the temperature data; (c) creating a predetermined equation using a prediction model of estimating a predicted temperature of the temperature data; (d) calculating a solution of minimizing a deviation between the reference temperature and the predicted temperature based on the predetermined equation; and (e) outputting a calculated power supply value calculated from the solution, and processing a substrate while controlling heating of the heater based on the calculated power supply value.