公开(公告)号：US12050138B2

公开(公告)日：2024-07-30

申请号：US17532426

申请日：2021-11-22

申请人： KOKUSAI ELECTRIC CORPORATION

发明人： Akihiro Osaka ,  Hideto Yamaguchi ,  Tetsuya Kosugi ,  Tokunobu Akao ,  Atsushi Umekawa ,  Motoya Takewaki

IPC分类号： G01K1/08 ,  G01K1/14 ,  G01K7/02 ,  H01L21/22 ,  H01L21/324 ,  H01L21/66 ,  H01L21/67

CPC分类号： G01K1/08 ,  G01K1/14 ,  G01K7/02 ,  H01L21/22 ,  H01L21/324 ,  H01L21/67098 ,  H01L21/67248 ,  H01L22/12

摘要： A thermocouple includes: a temperature measuring portion configured to measure an internal temperature of a reaction tube; a main body portion provided therein with a wire which constitutes the temperature measuring portion; and a cushioning portion attached to the main body portion at least in the vicinity of the temperature measuring portion, wherein the thermocouple is fixed to an outer surface of the reaction tube in a state in which the thermocouple makes contact with the reaction tube through the cushioning portion.

公开(公告)号：US11300456B2

公开(公告)日：2022-04-12

申请号：US16685643

申请日：2019-11-15

申请人： KOKUSAI ELECTRIC CORPORATION

发明人： Akihiro Osaka ,  Hideto Yamaguchi ,  Tetsuya Kosugi ,  Tokunobu Akao ,  Atsushi Umekawa ,  Motoya Takewaki

IPC分类号： G01K1/08 ,  G01K1/14 ,  G01K7/02

摘要： A thermocouple includes: a temperature measuring portion configured to measure an internal temperature of a reaction tube; a main body portion provided therein with a wire which constitutes the temperature measuring portion; and a cushioning portion attached to the main body portion at least in the vicinity of the temperature measuring portion, wherein the thermocouple is fixed to an outer surface of the reaction tube in a state in which the thermocouple makes contact with the reaction tube through the cushioning portion.