公开(公告)号：US20170193680A1

公开(公告)日：2017-07-06

申请号：US15396800

申请日：2017-01-02

Applicant: KLA-Tencor Corporation

Inventor： Jing Zhang ,  Grace Hsiu-Ling Chen ,  Kris Bhaskar ,  Keith Wells ,  Nan Bai ,  Ping Gu ,  Lisheng Gao

IPC: G06T11/60 ,  H01L21/67 ,  G01N21/95 ,  G06K9/62 ,  G06T7/00

CPC classification number: G01N21/9501 ,  G01N2201/12 ,  G06K9/4628 ,  G06K9/6273 ,  G06K9/6857 ,  G06K2209/19 ,  G06T3/4053

Abstract: Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.

公开(公告)号：US10648924B2

公开(公告)日：2020-05-12

申请号：US15396800

申请日：2017-01-02

Applicant: KLA-Tencor Corporation

Inventor： Jing Zhang ,  Grace Hsiu-Ling Chen ,  Kris Bhaskar ,  Keith Wells ,  Nan Bai ,  Ping Gu ,  Lisheng Gao

IPC: G01N21/95 ,  G06K9/68 ,  G06K9/62 ,  G06K9/46 ,  G06T3/40

Abstract: Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.