公开(公告)号：US08797534B2

公开(公告)日：2014-08-05

申请号：US14034869

申请日：2013-09-24

Applicant: KLA-Tencor Corporation

Inventor： Johannes D. de Veer ,  Leonid Poslavsky ,  G. Vera Zhuang ,  Shankar Krishnan

IPC: G01J4/00

CPC classification number: G01N21/21 ,  G01J3/504 ,  G01N21/274

Abstract: An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.

Abstract translation: 一种在任何入射角度校准偏振光学系统中的偏振器的装置。 该装置将系统的极化效应与样品的极化效应分离。 该装置包括具有设置在表面上的偏振器的基板。 衬底上的指示器指示偏振器的偏振取向，其偏离相对于衬底的预定取向。

公开(公告)号：US20140043608A1

公开(公告)日：2014-02-13

申请号：US14034869

申请日：2013-09-24

Applicant: KLA-Tencor Corporation

Inventor： Johannes D. de Veer ,  Leonid Poslavsky ,  G. Vera Zhuang ,  Shankar Krishnan

IPC: G01N21/21

CPC classification number: G01N21/21 ,  G01J3/504 ,  G01N21/274

Abstract: An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.

Abstract translation: 一种在任何入射角度校准偏振光学系统中的偏振器的装置。 该装置将系统的极化效应与样品的极化效应分离。 该装置包括具有设置在表面上的偏振器的基板。 衬底上的指示器指示偏振器的偏振取向，其偏离相对于衬底的预定取向。