公开(公告)号：US10145944B1

公开(公告)日：2018-12-04

申请号：US14703664

申请日：2015-05-04

Applicant: KLA-Tencor Corporation

Inventor： Anatoly Shchemelinin ,  Wei Zhao ,  Daniel Scott

IPC: G01C3/08 ,  G01S7/497 ,  G01S17/42

Abstract: An optical alignment system includes a LADAR sub-system including: a laser source and a probe configured to deliver probe illumination from the laser source to a first optical surface of the optical system and an additional optical surface of the optical system. The probe is further configured to receive a first measurement signal from the first optical surface and an additional measurement signal from the additional optical surface of the optical system. The system also includes a detector configured to receive a first combined signal and an additional combined signal from an optical coupling assembly. The system further include a controller configured to determine a relative distance between the first optical surface and the additional optical surface based on the first combined signal or the additional combined signal.