公开(公告)号：US20130250582A1

公开(公告)日：2013-09-26

申请号：US13898470

申请日：2013-05-21

Applicant: KLA-Tencor Corporation

Inventor： Guoheng Zhao ,  Azmi Kadkly

IPC: F21V5/00

CPC classification number: F21V5/008 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/9505

Abstract: Illumination subsystems for multi-spot wafer inspection are provided. One illumination subsystem includes a diffractive optical element configured to separate an illumination light beam into multiple light beams and a refractive lens array positioned in the path of the multiple light beams. The refractive lens array is configured to relay the laser beam waist at the diffractive optical element onto a wafer surface and to separately and simultaneously focus each of the multiple light beams to a wafer for inspection.

Abstract translation: 提供了多点晶圆检查的照明子系统。 一个照明子系统包括被配置为将照明光束分离成多个光束的衍射光学元件和位于多个光束的路径中的折射透镜阵列。 折射透镜阵列被配置为将衍射光学元件处的激光束腰部中继到晶片表面上，并且将多个光束中的每一个分别并且同时聚焦到晶片以进行检查。

公开(公告)号：US08879056B2

公开(公告)日：2014-11-04

申请号：US13898470

申请日：2013-05-21

Applicant: KLA-Tencor Corporation

Inventor： Guoheng Zhao ,  Azmi Kadkly

IPC: G01N21/00 ,  G01N21/95 ,  F21V5/00

CPC classification number: F21V5/008 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/9505

Abstract: Illumination subsystems for multi-spot wafer inspection are provided. One illumination subsystem includes a diffractive optical element configured to separate an illumination light beam into multiple light beams and a refractive lens array positioned in the path of the multiple light beams. The refractive lens array is configured to relay the laser beam waist at the diffractive optical element onto a wafer surface and to separately and simultaneously focus each of the multiple light beams to a wafer for inspection.

Abstract translation: 提供了多点晶圆检查的照明子系统。 一个照明子系统包括被配置为将照明光束分离成多个光束的衍射光学元件和位于多个光束的路径中的折射透镜阵列。 折射透镜阵列被配置为将衍射光学元件处的激光束腰部中继到晶片表面上，并且将多个光束中的每一个分别并且同时聚焦到晶片以进行检查。