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公开(公告)号：US11195268B2
公开(公告)日：2021-12-07
申请号：US16117383
申请日：2018-08-30
Applicant: KLA-TENCOR CORPORATION
Inventor： Santosh Kumar , Pavan Kumar Perali
IPC: G06T7/00 , G01N23/2251 , H01L21/66 , H01L21/027
Abstract: Techniques and systems to achieve more accurate design alignment to an image by improved pixel-to-design alignment (PDA) target selection are disclosed. PDA targets in an image frame of a die can be biased to include a hotspot location in one of the PDA targets. The PDA targets can be evaluated for repetitive patterns by analyzing the uniqueness of the points used as the PDA targets.
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